Variable Mems-Based Inductors Fabricated from PECVD Silicon Nitride

John Dell, Charles Musca, Jarek Antoszewski, Lorenzo Faraone, K. Winchester

Research output: Chapter in Book/Conference paperConference paper

13 Citations (Scopus)
Original languageEnglish
Title of host publicationCommad 2002 Proceedings (02EX 601)
EditorsM. Gal
Place of PublicationPiscataway, New Jersey, USA
PublisherIEEE, Institute of Electrical and Electronics Engineers
Pages567-570
Volume1 only
EditionSydney, NSW, Australia
ISBN (Print)0780375718
Publication statusPublished - 2002
EventVariable Mems-Based Inductors Fabricated from PECVD Silicon Nitride - Sydney, NSW, Australia
Duration: 1 Jan 2002 → …

Conference

ConferenceVariable Mems-Based Inductors Fabricated from PECVD Silicon Nitride
Period1/01/02 → …

Cite this

Dell, J., Musca, C., Antoszewski, J., Faraone, L., & Winchester, K. (2002). Variable Mems-Based Inductors Fabricated from PECVD Silicon Nitride. In M. Gal (Ed.), Commad 2002 Proceedings (02EX 601) (Sydney, NSW, Australia ed., Vol. 1 only, pp. 567-570). IEEE, Institute of Electrical and Electronics Engineers.