UV sensing using Surface Acoustic Wave Device on DC sputtered ZnO monolayer

Leo Schuler, M.M. Alkaisi, P. Miller, R.J. Reeves

    Research output: Contribution to journalArticlepeer-review

    40 Citations (Scopus)

    Abstract

    Zinc oxide (ZnO) thin films were deposited on silicon substrates by DC sputtering deposition. Thermal annealing was performed at up to 900 °C in N2 for 30 min. The effect of annealing on the crystal quality was investigated using X-ray diffraction, photoluminescence (PL) spectra, atomic force microscopy, scanning electron microscopy, and piezoelectric measurements. The PL response improved considerably during annealing. The piezoelectricity (d33) of selected films was measured using laser interferometric measurements. It showed, that d33 decreases with annealing temperature. A novel device, based on a SAW device, has been designed and fabricated for UV sensing. The sputtered ZnO monofilm has been optimised for both piezoelectric properties and UV sensing ability. The fabrication using electron beam lithography, Al evaporation and lift-off as well as constraints experienced during miniaturisation will be discussed.
    Original languageEnglish
    Pages (from-to)1403-1406
    JournalMicroelectronic Engineering
    Volume83
    Issue number4-9
    DOIs
    Publication statusPublished - 2006

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