Tuneable IR Photodetectors for Spectroscopic Applications

Jarek Antoszewski; Thuyen Nguyen; Dilusha Silva; Lorenzo Faraone

doi:10.1016/j.proeng.2012.09.169

Tuneable IR Photodetectors for Spectroscopic Applications

Jarek Antoszewski, Thuyen Nguyen, Dilusha Silva, Lorenzo Faraone

Research output: Chapter in Book/Conference paper › Conference paper › peer-review

1 Citation (Scopus)

Abstract

The concept and realisation of infrared micro-spectrometers using MEMS based Fabry-Pérot micro-filters integrated with IR photo-detectors are presented. By using five layer mirror structures, and stress optimisation in mirrors and actuators the tuning range from 1700 nm to 2300 nm has been achieved with maximum actuation voltage of only 18 V RMS. The average FWHM of the transmission peak was measured to be 35 nm, predominantly limited by thickness nonuniformity of individual mirror layers.

Original language	English
Title of host publication	26th European Conference on Solid-State Transducers (EUROSENSOR 2012)
Subtitle of host publication	Proceedings of a meeting held 9-12 September 2012, Krakow, Poland.
Place of Publication	Netherlands
Publisher	Elsevier
Pages	406-409
Volume	47
ISBN (Print)	9781627486170
DOIs	https://doi.org/10.1016/j.proeng.2012.09.169
Publication status	Published - 2012
Event	26th European Conference on Solid-State Transducers - Krakow, Poland Duration: 9 Sept 2012 → 12 Sept 2012 Conference number: 26

Publication series

Name	Procedia Engineering
Publisher	Elsevier
Volume	47
ISSN (Print)	1877-7058

Conference

Conference	26th European Conference on Solid-State Transducers
Abbreviated title	EUROSENSOR 2012
Country/Territory	Poland
City	Krakow
Period	9/09/12 → 12/09/12

Access to Document

10.1016/j.proeng.2012.09.169Licence: CC BY-NC-ND

Cite this

Antoszewski, J., Nguyen, T., Silva, D., & Faraone, L. (2012). Tuneable IR Photodetectors for Spectroscopic Applications. In 26th European Conference on Solid-State Transducers (EUROSENSOR 2012): Proceedings of a meeting held 9-12 September 2012, Krakow, Poland. (Vol. 47, pp. 406-409). (Procedia Engineering; Vol. 47). Elsevier. https://doi.org/10.1016/j.proeng.2012.09.169

@inproceedings{e831bc98593c4a1491f6057c53c825f6,

title = "Tuneable IR Photodetectors for Spectroscopic Applications",

abstract = "The concept and realisation of infrared micro-spectrometers using MEMS based Fabry-P{\'e}rot micro-filters integrated with IR photo-detectors are presented. By using five layer mirror structures, and stress optimisation in mirrors and actuators the tuning range from 1700 nm to 2300 nm has been achieved with maximum actuation voltage of only 18 V RMS. The average FWHM of the transmission peak was measured to be 35 nm, predominantly limited by thickness nonuniformity of individual mirror layers.",

author = "Jarek Antoszewski and Thuyen Nguyen and Dilusha Silva and Lorenzo Faraone",

year = "2012",

doi = "10.1016/j.proeng.2012.09.169",

language = "English",

isbn = "9781627486170",

volume = "47",

series = "Procedia Engineering",

publisher = "Elsevier",

pages = "406--409",

booktitle = "26th European Conference on Solid-State Transducers (EUROSENSOR 2012)",

address = "Netherlands",

note = "26th European Conference on Solid-State Transducers, EUROSENSOR 2012 ; Conference date: 09-09-2012 Through 12-09-2012",

}

Antoszewski, J, Nguyen, T, Silva, D & Faraone, L 2012, Tuneable IR Photodetectors for Spectroscopic Applications. in 26th European Conference on Solid-State Transducers (EUROSENSOR 2012): Proceedings of a meeting held 9-12 September 2012, Krakow, Poland.. vol. 47, Procedia Engineering, vol. 47, Elsevier, Netherlands, pp. 406-409, 26th European Conference on Solid-State Transducers, Krakow, Poland, 9/09/12. https://doi.org/10.1016/j.proeng.2012.09.169

Tuneable IR Photodetectors for Spectroscopic Applications. / Antoszewski, Jarek; Nguyen, Thuyen; Silva, Dilusha et al.
26th European Conference on Solid-State Transducers (EUROSENSOR 2012): Proceedings of a meeting held 9-12 September 2012, Krakow, Poland.. Vol. 47 Netherlands: Elsevier, 2012. p. 406-409 (Procedia Engineering; Vol. 47).

Research output: Chapter in Book/Conference paper › Conference paper › peer-review

TY - GEN

T1 - Tuneable IR Photodetectors for Spectroscopic Applications

AU - Antoszewski, Jarek

AU - Nguyen, Thuyen

AU - Silva, Dilusha

AU - Faraone, Lorenzo

N1 - Conference code: 26

PY - 2012

Y1 - 2012

N2 - The concept and realisation of infrared micro-spectrometers using MEMS based Fabry-Pérot micro-filters integrated with IR photo-detectors are presented. By using five layer mirror structures, and stress optimisation in mirrors and actuators the tuning range from 1700 nm to 2300 nm has been achieved with maximum actuation voltage of only 18 V RMS. The average FWHM of the transmission peak was measured to be 35 nm, predominantly limited by thickness nonuniformity of individual mirror layers.

AB - The concept and realisation of infrared micro-spectrometers using MEMS based Fabry-Pérot micro-filters integrated with IR photo-detectors are presented. By using five layer mirror structures, and stress optimisation in mirrors and actuators the tuning range from 1700 nm to 2300 nm has been achieved with maximum actuation voltage of only 18 V RMS. The average FWHM of the transmission peak was measured to be 35 nm, predominantly limited by thickness nonuniformity of individual mirror layers.

U2 - 10.1016/j.proeng.2012.09.169

DO - 10.1016/j.proeng.2012.09.169

M3 - Conference paper

SN - 9781627486170

VL - 47

T3 - Procedia Engineering

SP - 406

EP - 409

BT - 26th European Conference on Solid-State Transducers (EUROSENSOR 2012)

PB - Elsevier

CY - Netherlands

T2 - 26th European Conference on Solid-State Transducers

Y2 - 9 September 2012 through 12 September 2012

ER -

Tuneable IR Photodetectors for Spectroscopic Applications

Abstract

Publication series

Conference

Access to Document

Fingerprint

Cite this