Tuneable Fabry-Perot filters operating in the 3 to 5um range for infrared micro-spectrometer applications

Jarek Antoszewski, Adrian Keating, K.J. Winchester, Tien Nguyen, Dilusha Silva, Charles Musca, John Dell, O. Samardzic, Lorenzo Faraone

Research output: Chapter in Book/Conference paperConference paper

Original languageEnglish
Title of host publicationProceedings of SPIE on MEMS, MOEMS, and Micromachining II
EditorsHakan Ürey, Ayman El-Fatatry
Place of PublicationUnited States of America
PublisherSPIE
Pages618608-1 - 618608-9
Volume6186
EditionStrasbourg, France
ISBN (Print)081946242X
Publication statusPublished - 2006
EventTuneable Fabry-Perot filters operating in the 3 to 5um range for infrared micro-spectrometer applications - Strasbourg, France
Duration: 1 Jan 2006 → …

Conference

ConferenceTuneable Fabry-Perot filters operating in the 3 to 5um range for infrared micro-spectrometer applications
Period1/01/06 → …

Cite this

Antoszewski, J., Keating, A., Winchester, K. J., Nguyen, T., Silva, D., Musca, C., ... Faraone, L. (2006). Tuneable Fabry-Perot filters operating in the 3 to 5um range for infrared micro-spectrometer applications. In H. Ürey, & A. El-Fatatry (Eds.), Proceedings of SPIE on MEMS, MOEMS, and Micromachining II (Strasbourg, France ed., Vol. 6186, pp. 618608-1 - 618608-9). United States of America: SPIE.