@inproceedings{5d35916148f2485c98c68e3b3d6a9c79,
title = "Tunable Fabry-Perot Cavities",
author = "K. Winchester and S.M.R. Spaargaren and John Dell",
year = "2001",
language = "English",
isbn = "0819439029",
volume = "4230",
pages = "198--209",
editor = "K. Chau and A.M. Parameswaran and F.E. Tay",
booktitle = "Proceedings of SPIE on Micromachining and Microfabrication",
publisher = "SPIE",
address = "United States",
edition = "Shangri-La Hotel, Singapore",
note = "Tunable Fabry-Perot Cavities ; Conference date: 01-01-2001",
}