Tunable Fabry-Pérot cavities fabricated from PECVD silicon nitride employing zinc sulphide as the sacrificial layer

K. Winchester, John Dell

Research output: Contribution to journal › Article › peer-review

50 Citations (Scopus)

Original language	English
Pages (from-to)	589-594
Journal	Journal of Micromechanics and Microengineering
Volume	11
DOIs	https://doi.org/10.1088/0960-1317/11/5/323
Publication status	Published - 2001

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title = "Tunable Fabry-P{\'e}rot cavities fabricated from PECVD silicon nitride employing zinc sulphide as the sacrificial layer",

author = "K. Winchester and John Dell",

year = "2001",

doi = "10.1088/0960-1317/11/5/323",

language = "English",

volume = "11",

pages = "589--594",

journal = "Journal of Micromechanics and Microengineering",

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T1 - Tunable Fabry-Pérot cavities fabricated from PECVD silicon nitride employing zinc sulphide as the sacrificial layer

AU - Winchester, K.

AU - Dell, John

PY - 2001

Y1 - 2001

U2 - 10.1088/0960-1317/11/5/323

DO - 10.1088/0960-1317/11/5/323

M3 - Article

SN - 0960-1317

VL - 11

SP - 589

EP - 594

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

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