Tunable Fabry-Pérot cavities fabricated from PECVD silicon nitride employing zinc sulphide as the sacrificial layer

K. Winchester, John Dell

Research output: Contribution to journalArticle

49 Citations (Scopus)
Original languageEnglish
Pages (from-to)589-594
JournalJournal of Micromechanics and Microengineering
Volume11
DOIs
Publication statusPublished - 2001

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