Transferable silicon nitride microcavities

K. Winchester, S.M.R. Spaargaren, John Dell

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

The ability to construct self-supporting or suspended structures is essential for many micro-electro-mechanical systems (MEMS). Well-established technologies exist for the fabrication of such structures using deposition of SiNx grown by low-pressure chemical vapour deposition (LPCVD). However, such techniques are not suitable for temperature-sensitive substrates. While lower process temperatures (
Original languageEnglish
Pages (from-to)523-529
JournalMicroelectronics Journal
Volume31
Issue number7
DOIs
Publication statusPublished - 2000

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