Towards MEMS-enabled tunable metamaterial bandpass filter for long-wavelength infrared

Oleg Bannik, Mingkai Liu, Fedor Kovalev, Ilya Shadrivov, Lorenzo Faraone, Mariusz Martyniuk

Research output: Chapter in Book/Conference paperConference paperpeer-review

Abstract

We discuss our advancements in creating a MEMS-enabled tunable plasmonic metamaterial for spectral filtering in the long-wavelength infrared range. We outline the metamaterial design, its simulated transmission, fabrication process, and the design of a microelectromechanical actuator with integrated metamaterial. Additionally, we present the characteristics of the initial fabricated samples and compare them with the modeled results.

Original languageEnglish
Title of host publication2024 49th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2024
Place of PublicationUSA
PublisherIEEE, Institute of Electrical and Electronics Engineers
Number of pages2
ISBN (Electronic)9798350370324
DOIs
Publication statusPublished - 7 Oct 2024
Event49th International Conference on Infrared, Millimeter, and Terahertz Waves - Perth, Australia
Duration: 1 Sept 20246 Sept 2024

Publication series

NameInternational Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz
ISSN (Print)2162-2027
ISSN (Electronic)2162-2035

Conference

Conference49th International Conference on Infrared, Millimeter, and Terahertz Waves
Abbreviated titleRMMW-THz 2024
Country/TerritoryAustralia
CityPerth
Period1/09/246/09/24

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