@inproceedings{af106bd577194fda82471a6a0af80b14,
title = "Towards MEMS-based Long-wavelength Infrared Tuneable Fabry-Perot Filters",
author = "Mao, {Hai Feng} and Mariusz Martyniuk and Dilusha Silva and Jarek Antoszewski and John Bumgarner and Lorenzo Faraone",
year = "2014",
doi = "10.1109/COMMAD.2014.7038677",
language = "English",
isbn = "9781479968671",
volume = "N/A",
pages = "149--152",
booktitle = "COMMAD 2014 Conference Proceedings",
publisher = "IEEE, Institute of Electrical and Electronics Engineers",
address = "United States",
note = "2014 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2014 ; Conference date: 14-12-2014 Through 17-12-2014",
}