Towards MEMS-based chem/bio sensing arrays with on-chip optical read-out | Rozwój czujników MEMS z zintegrowanym systemem odczytu

    Research output: Contribution to journalArticle

    Abstract

    © 2015, Wydawnictwo SIGMA - N O T Sp. z o.o. All rights reserved. Sensing on the microscale using microelectromechanical systems (MEMS) has established itself commercially as one of the dominant world-wide sensing technologies, providing commercialised sensing solutions for pressure, inertia, temperature, as well as for more challenging applications in remote infrared imaging and energy harvesting. However, to date MEMS has not delivered any commercially successful chem/bio sensor, even though it has been established for some time that microcantilever-based sensing can detect chem/bio agents at the level of single molecules or even zeptograms (10-21 g). The widespread application of this class of sensors has been largely impeded by the lack of a technology capable of performing high-resolution measurements of large arrays of MEMS devices. We demonstrate a technology capable of filling that need that is based on MEMS suspended microcantilevers and an on-chip optical read-out, and show an implementation of an effective toluene sensor.
    Original languageEnglish
    Pages (from-to)233-236
    JournalPrzeglad Elektrotechniczny
    Volume91
    Issue number10
    DOIs
    Publication statusPublished - 2015

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    MEMS
    Sensors
    Energy harvesting
    Infrared imaging
    Toluene
    Molecules
    Temperature

    Cite this

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    title = "Towards MEMS-based chem/bio sensing arrays with on-chip optical read-out | Rozw{\'o}j czujnik{\'o}w MEMS z zintegrowanym systemem odczytu",
    abstract = "{\circledC} 2015, Wydawnictwo SIGMA - N O T Sp. z o.o. All rights reserved. Sensing on the microscale using microelectromechanical systems (MEMS) has established itself commercially as one of the dominant world-wide sensing technologies, providing commercialised sensing solutions for pressure, inertia, temperature, as well as for more challenging applications in remote infrared imaging and energy harvesting. However, to date MEMS has not delivered any commercially successful chem/bio sensor, even though it has been established for some time that microcantilever-based sensing can detect chem/bio agents at the level of single molecules or even zeptograms (10-21 g). The widespread application of this class of sensors has been largely impeded by the lack of a technology capable of performing high-resolution measurements of large arrays of MEMS devices. We demonstrate a technology capable of filling that need that is based on MEMS suspended microcantilevers and an on-chip optical read-out, and show an implementation of an effective toluene sensor.",
    author = "Mariusz Martyniuk",
    year = "2015",
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    AB - © 2015, Wydawnictwo SIGMA - N O T Sp. z o.o. All rights reserved. Sensing on the microscale using microelectromechanical systems (MEMS) has established itself commercially as one of the dominant world-wide sensing technologies, providing commercialised sensing solutions for pressure, inertia, temperature, as well as for more challenging applications in remote infrared imaging and energy harvesting. However, to date MEMS has not delivered any commercially successful chem/bio sensor, even though it has been established for some time that microcantilever-based sensing can detect chem/bio agents at the level of single molecules or even zeptograms (10-21 g). The widespread application of this class of sensors has been largely impeded by the lack of a technology capable of performing high-resolution measurements of large arrays of MEMS devices. We demonstrate a technology capable of filling that need that is based on MEMS suspended microcantilevers and an on-chip optical read-out, and show an implementation of an effective toluene sensor.

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