Thermal Stability of PECVD SiNX Films

Neerushana Jehanathan, Yinong Liu, B.A. Walmsley, John Dell, Lorenzo Faraone

Research output: Chapter in Book/Conference paperConference paperpeer-review

Original languageEnglish
Title of host publicationProceedings of the 2006 International Conference of Nanoscience and Nanotechnology
EditorsC. Jagadish, C.Q. Max Lu
Place of PublicationBrisbane, Qld
PublisherIEEE, Institute of Electrical and Electronics Engineers
EditionBrisbane, Qld
ISBN (Print)1424404533
Publication statusPublished - 2006
Event2006 International Conference on Nanoscience and Nanotechnology, ICONN 2006 - Brisbane, Australia
Duration: 3 Jul 20066 Jul 2006


Conference2006 International Conference on Nanoscience and Nanotechnology, ICONN 2006
Abbreviated titleICONN 2006
OtherThe aim of the 2006 International Conference On Nanoscience and Nanotechnology (ICONN 2006) is to bring together the Australian and International community (students, scientists and engineers from academia, govt. laboratories and industry) working in the field of nanoscale science and technology to discuss new and exciting advances in the field. ICONN will cover nanostructure growth, synthesis, fabrication, characterization, device design, modeling, fabrication, testing and applications. The conference will feature plenary talks followed by technical symposia (parallel sessions) consisting of invited talks, oral and poster presentations on the following topics.

Nanomaterials including Nanocrystals, Nanotubes (carbon and inorganic), Nanowires
Bio-Nanotechnology, Nano-Medicine and Nanobionics
Nanoelectronics, Spintronics, Nano-Magnetics, Quantum computing
Molecular and Organic Electronics, Organic Displays
Nano-Optics, Nano-Optoelectronics, Nano-Photonics
Nano-membranes, Nano-porous and Electrochemical Materials
Nano-fabrication, Nano-lithography, Nano-manipulation
Nanoscale Characterisation, Nano-imaging
Computational Nanotechnology (Modelling and Simulation of Nanostructures)
Nano-MEMS, Nano-Fluidics, Nano-Actuators, Nano-Sensors, Nano-Robotics, NanoSystems
Nano-Manufacturing, Reliability, Standards, Safety and Ethical issues
Education, Training and Skills in Nanotechnology
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