Thermal Stability of PECVD SiN/sub x/ Films: 2006 International Conference on Nanoscience and Nanotechnology

N. Jehanathan, Y. Liu, B. Walmsley, J. Dell, L. Faraone

Research output: Chapter in Book/Conference paperConference paper

Abstract

This study investigates the effect of oxidation on the structural integrity of PECVD SiNx thin films at elevated temperatures in dry air, by means of scanning electron microscopy (SEM), Fourier transform infrared spectroscopy and nanoindentation measurement. It is found the heating to elevated temperatures results in the replacement of the nitrogen content in the films by oxygen, implying an oxidation process. SEM examination revealed that the surface of the films is severely damaged, mostly in the form of circular in-plane cracks, as a result of the oxidation heating. This in turn leads to high scattering of the nanoindentation measurement of mechanical properties
Original languageEnglish
Title of host publicationProceedings of 2006 International Conference on Nanoscience and Nanotechnology ICONN 2006
PublisherIEEE, Institute of Electrical and Electronics Engineers
Pages76-79
DOIs
Publication statusPublished - 2006
EventInternational Conference on Nanoscience and Nanotechnology - Brisbane, Australia
Duration: 3 Jul 20067 Jul 2006
http://www.ausnano.net/iconn2006/

Conference

ConferenceInternational Conference on Nanoscience and Nanotechnology
Abbreviated titleICONN 2006
CountryAustralia
CityBrisbane
Period3/07/067/07/06
OtherThe aim of the 2006 International Conference On Nanoscience and Nanotechnology (ICONN 2006) is to bring together the Australian and International community (students, scientists and engineers from academia, govt. laboratories and industry) working in the field of nanoscale science and technology to discuss new and exciting advances in the field. ICONN will cover nanostructure growth, synthesis, fabrication, characterization, device design, modeling, fabrication, testing and applications. The conference will feature plenary talks followed by technical symposia (parallel sessions) consisting of invited talks, oral and poster presentations on the following topics.

Nanomaterials including Nanocrystals, Nanotubes (carbon and inorganic), Nanowires
Bio-Nanotechnology, Nano-Medicine and Nanobionics
Nanoelectronics, Spintronics, Nano-Magnetics, Quantum computing
Molecular and Organic Electronics, Organic Displays
Nano-Optics, Nano-Optoelectronics, Nano-Photonics
Nano-membranes, Nano-porous and Electrochemical Materials
Nano-fabrication, Nano-lithography, Nano-manipulation
Nanoscale Characterisation, Nano-imaging
Computational Nanotechnology (Modelling and Simulation of Nanostructures)
Nano-MEMS, Nano-Fluidics, Nano-Actuators, Nano-Sensors, Nano-Robotics, NanoSystems
Nano-Manufacturing, Reliability, Standards, Safety and Ethical issues
Education, Training and Skills in Nanotechnology
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Jehanathan, N., Liu, Y., Walmsley, B., Dell, J., & Faraone, L. (2006). Thermal Stability of PECVD SiN/sub x/ Films: 2006 International Conference on Nanoscience and Nanotechnology. In Proceedings of 2006 International Conference on Nanoscience and Nanotechnology ICONN 2006 (pp. 76-79). IEEE, Institute of Electrical and Electronics Engineers. https://doi.org/10.1109/ICONN.2006.340554