The Use of ZnS as a Sacrificial Layer in the Construction of PECVD SiNx Self-Supporting Structures

K. Winchester, S.M.R. Spaargaren, John Dell

Research output: Chapter in Book/Conference paperConference paperpeer-review

4 Citations (Scopus)
Original languageEnglish
Title of host publication1998 Conference on Optoelectronic and Microelectronic Materials and Devices Proceedings
EditorsL. Faraone, J.D. Dell, T.A. Fisher, C.A. Musca, B.D. Nener
Place of PublicationPiscataway, NJ, USA
PublisherIEEE, Institute of Electrical and Electronics Engineers
Pagesi-xiv, 493-496
VolumeN/A
EditionPerth, Western Australia
ISBN (Print)0780345134
Publication statusPublished - 1999
EventThe Use of ZnS as a Sacrificial Layer in the Construction of PECVD SiNx Self-Supporting Structures - Perth, Western Australia
Duration: 1 Jan 1999 → …

Conference

ConferenceThe Use of ZnS as a Sacrificial Layer in the Construction of PECVD SiNx Self-Supporting Structures
Period1/01/99 → …

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