Original language | English |
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Title of host publication | Proceedings of the 17th World Congress (IFAC) |
Editors | Myung Jin Chung, Pradeep Misra |
Place of Publication | Korea |
Publisher | IFAC |
Pages | 946-951 |
Volume | 1 |
Edition | Korea |
ISBN (Print) | 9783902661005 |
Publication status | Published - 2008 |
Event | Temperature Cycling for Photoresist Processing - Korea Duration: 1 Jan 2008 → … |
Conference
Conference | Temperature Cycling for Photoresist Processing |
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Period | 1/01/08 → … |