| Original language | English |
|---|---|
| Title of host publication | Proceedings of the 17th World Congress (IFAC) |
| Editors | Myung Jin Chung, Pradeep Misra |
| Place of Publication | Korea |
| Publisher | IFAC |
| Pages | 946-951 |
| Volume | 1 |
| Edition | Korea |
| ISBN (Print) | 9783902661005 |
| Publication status | Published - 2008 |
| Event | Temperature Cycling for Photoresist Processing - Korea Duration: 1 Jan 2008 → … |
Conference
| Conference | Temperature Cycling for Photoresist Processing |
|---|---|
| Period | 1/01/08 → … |
Cite this
Wang, Y., Chua, H., Tay, A., & Fang, Z. P. (2008). Temperature Cycling for Photoresist Processing. In M. J. Chung, & P. Misra (Eds.), Proceedings of the 17th World Congress (IFAC) (Korea ed., Vol. 1, pp. 946-951). Korea: IFAC.