Technologies for all-optical micro-electro-mechanical systems cantilever-based sensing systems

[Truncated abstract] This thesis considers a sensing technology for simultaneous measurement of many integrated cantilever sensors in which the displacement or resonant frequency changes induced by analyte absorption on each cantilever could be measured. Such a technology could significant improve statistical detection accuracy, response time and robustness against false positives and missed positives. However, significant challenges must be met such as how to form massively parallel sensing systems, the rejection of changes induced by factors not directly related the measured in question, the ability to operate in hostile environments, and miniaturization of the overall sensing system. A popular approach studied in recent years is to combine microelectromechanical systems (MEMS) cantilever-based sensor technologies with integrated optics to overcome these limitations. MEMS cantilever-based sensor technologies rely on changes induced in the mechanical movement or deformation of cantilevers. Signal readout and, in some cases, actuation are vital elements in the realization of MEMS cantilever-based sensors. Optical approaches (both readout and actuation technologies) to interrogation of sensor networks have significant advantages over electrical methods. These include being less susceptible to noise/crosstalk, potentially higher speed, greater signal security, and the possibility to reduce interconnect issues.