@inproceedings{ac99b8ab73264bb580d430064c7d8c0c,
title = "Technologies for adaptive SWIR multispectral imaging",
abstract = "While agile multispectral imaging solutions presently exist, their size, weight and power (SWaP) specifications prevents deployment on small portable platforms such as drones. As much of the size and weight of existing solutions is attributed to the wavelength-selective optical subsystem, realizing low-SWaP hinges on miniaturization of this subsystem. The ultimate multispectral imaging implementation would integrate the wavelength-selective component at the imaging focal plane array. This paper presents a solution which aims to achieve such integration. Recent developments in microelectromechanical systems (MEMS) have realized a surface-micromachined optical tunable filter, operating in the shortwave infrared wavelength band (SWIR: 1 μm – 2.6 μm) for applications in miniature optical spectrometers. The tunable filter is a Fabry-Perot (FP) structure, composed of a fixed dielectric mirror on a silicon substrate, and a movable dielectric mirror suspended above. The separation (air gap) between these two mirrors defines the optical transmission centre-wavelength of this Fabry Perot structure. Consequently, electrostatic actuation of the top mirror towards the bottom mirror allows the gap, and thus the transmission centre-wavelength, to be controlled. This paper presents work towards integration of such a MEMS tunable filter technology directly on an infrared focal plan array. Realizing this integration relies on: (1) expanding the optical area of the MEMS Fabry Perot structure to cover a significant portion of the two-dimensional focal plan array, which is generally multi-millimetre in each of its two dimensions; and (2) devising a structure that will allow actuation of the MEMS filter with under 20 V.",
keywords = "MEMS, multi-spectral, SWIR",
author = "Dilusha Silva and Hemendra Kala and Michal Zawierta and Dhirendra Tripathi and Gill, {Gurpreet Singh} and Jarek Antoszewski and Gilberto Umana-Membreno and Adrian Keating and John Dell and Brett Nener and Mariusz Martyniuk and Lorenzo Faraone",
note = "Publisher Copyright: {\textcopyright} 2024 SPIE.; Electro-Optical and Infrared Systems: Technology and Applications XXI 2024 ; Conference date: 16-09-2024 Through 19-09-2024",
year = "2024",
doi = "10.1117/12.3031842",
language = "English",
volume = "13200",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS",
editor = "Hickman, {Duncan L.} and Helge Bursing and Ove Steinvall and Soan, {Philip J.}",
booktitle = "Electro-Optical and Infrared Systems",
}