Abstract

While agile multispectral imaging solutions presently exist, their size, weight and power (SWaP) specifications prevents deployment on small portable platforms such as drones. As much of the size and weight of existing solutions is attributed to the wavelength-selective optical subsystem, realizing low-SWaP hinges on miniaturization of this subsystem. The ultimate multispectral imaging implementation would integrate the wavelength-selective component at the imaging focal plane array. This paper presents a solution which aims to achieve such integration. Recent developments in microelectromechanical systems (MEMS) have realized a surface-micromachined optical tunable filter, operating in the shortwave infrared wavelength band (SWIR: 1 μm – 2.6 μm) for applications in miniature optical spectrometers. The tunable filter is a Fabry-Perot (FP) structure, composed of a fixed dielectric mirror on a silicon substrate, and a movable dielectric mirror suspended above. The separation (air gap) between these two mirrors defines the optical transmission centre-wavelength of this Fabry Perot structure. Consequently, electrostatic actuation of the top mirror towards the bottom mirror allows the gap, and thus the transmission centre-wavelength, to be controlled. This paper presents work towards integration of such a MEMS tunable filter technology directly on an infrared focal plan array. Realizing this integration relies on: (1) expanding the optical area of the MEMS Fabry Perot structure to cover a significant portion of the two-dimensional focal plan array, which is generally multi-millimetre in each of its two dimensions; and (2) devising a structure that will allow actuation of the MEMS filter with under 20 V.

Original languageEnglish
Title of host publicationElectro-Optical and Infrared Systems
Subtitle of host publicationTechnology and Applications XXI
EditorsDuncan L. Hickman, Helge Bursing, Ove Steinvall, Philip J. Soan
PublisherSPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS
Number of pages5
Volume13200
ISBN (Electronic)9781510681088
DOIs
Publication statusPublished - 2024
EventElectro-Optical and Infrared Systems: Technology and Applications XXI 2024 - Edinburgh, United Kingdom
Duration: 16 Sept 202419 Sept 2024

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume13200
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

ConferenceElectro-Optical and Infrared Systems: Technology and Applications XXI 2024
Country/TerritoryUnited Kingdom
CityEdinburgh
Period16/09/2419/09/24

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