Targeted sacrificial layer etching for MEMS release using microfluidic channels

Research output: Chapter in Book/Conference paperConference paper

Original languageEnglish
Title of host publicationProceedings of SPIE Micro+Nano Materials, Devices and Applications
Place of PublicationUnited States
PublisherSPIE
Pages8923Q-1 - 8923Q-6
Volume8923
ISBN (Print)0277786X13
DOIs
Publication statusPublished - 2013
EventSPIE Micro+Nano Materials, Devices, and Applications 2013 Conference - Melbourne, Australia
Duration: 8 Dec 201311 Dec 2013

Conference

ConferenceSPIE Micro+Nano Materials, Devices, and Applications 2013 Conference
CountryAustralia
CityMelbourne
Period8/12/1311/12/13

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