Targeted Machining during MEMS Device Fabrication using PDMS Microfluidic Cassettes

Research output: Chapter in Book/Conference paperConference paper

Original languageEnglish
Title of host publicationProceedings of the 2014 Conference on Optoelectronic and Microelectronic Materials & Devices (COMMAD 2014)
Place of PublicationUnited States of America
PublisherIEEE, Institute of Electrical and Electronics Engineers
Pages79-82
VolumeN/A
ISBN (Print)9781479968671
Publication statusPublished - 2014
Event2014 Conference on Optoelectronic and Microelectronic Materials and Devices - University of Western Australia, Perth, Australia
Duration: 14 Dec 201417 Dec 2014

Conference

Conference2014 Conference on Optoelectronic and Microelectronic Materials and Devices
Abbreviated titleCOMMAD 2014
CountryAustralia
CityPerth
Period14/12/1417/12/14

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