Tailoring anchor shape during release of MEMS microbeams using microfluidic flow

B.C. Cheah; Adrian Keating; John Dell

doi:10.1109/COMMAD.2012.6472366

Tailoring anchor shape during release of MEMS microbeams using microfluidic flow

Research output: Chapter in Book/Conference paper › Conference paper › peer-review

Original language	English
Title of host publication	Optoelectronic and Microelectronic Materials & Devices (COMMAD), 2012 Conference on
Place of Publication	United States
Publisher	IEEE, Institute of Electrical and Electronics Engineers
Pages	73-74
Volume	1
ISBN (Electronic)	9781467330466
ISBN (Print)	9781467330473
DOIs	https://doi.org/10.1109/COMMAD.2012.6472366
Publication status	Published - 2012
Event	2012 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2012 - Melbourne, VIC, Australia Duration: 12 Dec 2012 → 14 Dec 2012

Conference

Conference	2012 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2012
Abbreviated title	COMMAD
Country/Territory	Australia
City	Melbourne, VIC
Period	12/12/12 → 14/12/12

Access to Document

10.1109/COMMAD.2012.6472366

Cite this

@inproceedings{e9e0e7aa63434083816c13d7da06b19f,

title = "Tailoring anchor shape during release of MEMS microbeams using microfluidic flow",

author = "B.C. Cheah and Adrian Keating and John Dell",

year = "2012",

doi = "10.1109/COMMAD.2012.6472366",

language = "English",

isbn = "9781467330473",

volume = "1",

pages = "73--74",

booktitle = "Optoelectronic and Microelectronic Materials & Devices (COMMAD), 2012 Conference on",

publisher = "IEEE, Institute of Electrical and Electronics Engineers",

address = "United States",

note = "2012 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2012, COMMAD ; Conference date: 12-12-2012 Through 14-12-2012",

}

Cheah, BC, Keating, A & Dell, J 2012, Tailoring anchor shape during release of MEMS microbeams using microfluidic flow. in Optoelectronic and Microelectronic Materials & Devices (COMMAD), 2012 Conference on. vol. 1, IEEE, Institute of Electrical and Electronics Engineers, United States, pp. 73-74, 2012 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2012, Melbourne, VIC, Australia, 12/12/12. https://doi.org/10.1109/COMMAD.2012.6472366

Tailoring anchor shape during release of MEMS microbeams using microfluidic flow. / Cheah, B.C.; Keating, Adrian ; Dell, John.
Optoelectronic and Microelectronic Materials & Devices (COMMAD), 2012 Conference on. Vol. 1 United States: IEEE, Institute of Electrical and Electronics Engineers, 2012. p. 73-74.

Research output: Chapter in Book/Conference paper › Conference paper › peer-review

TY - GEN

T1 - Tailoring anchor shape during release of MEMS microbeams using microfluidic flow

AU - Cheah, B.C.

AU - Keating, Adrian

AU - Dell, John

PY - 2012

Y1 - 2012

U2 - 10.1109/COMMAD.2012.6472366

DO - 10.1109/COMMAD.2012.6472366

M3 - Conference paper

SN - 9781467330473

VL - 1

SP - 73

EP - 74

BT - Optoelectronic and Microelectronic Materials & Devices (COMMAD), 2012 Conference on

PB - IEEE, Institute of Electrical and Electronics Engineers

CY - United States

T2 - 2012 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2012

Y2 - 12 December 2012 through 14 December 2012

ER -