Suspended Large-Area MEMS-Based Optical Filters for Multispectral Shortwave Infrared Imaging Applications

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    Abstract

    © 1992-2012 IEEE. We present the design, fabrication, and optical and mechanical characterization of silicon-/silicon-oxide-based optical filters and distributed Bragg reflectors in sizes ranging from 500 ~\mu {\rm m} \times 500 ~\mu {\rm m} to 5~{\rm mm} \times 5~{\rm mm}. They are designed to be used in conjunction with either single-element photodetectors or large-area focal plane arrays to realize tunable multispectral sensors or adaptive focal plane arrays in the shortwave infrared wavelength range. Surface optical profile measurements indicate a flatness of the order of 30 nm in the fabricated structures across several millimeters. Single-point spectral measurements on devices show an excellent agreement with simulated optical models, and demonstrate Si-SiOx-Si fixed optical filters with a 94% transmission at 1940 nm with a full-width at half-maximum of 250 nm. Distributed Bragg reflectors demonstrate 90% reflectance across the 1560-2050-nm wavelength range, making them suitable as broadband reflectors. The optical spatial uniformity across a 3-mm \times 3 -mm device shows only a 3% variation across the entire optically active area. Finally, the mechanical resonance characteristic of a 1-mm \times 1 -mm fabricated device shows the lowest resonant frequency of the suspended structure to be 39 kHz, indicating excellent immunity to extraneous low-frequency vibrations. [2014-0278]
    Original languageEnglish
    Pages (from-to)1102-1110
    JournalJournal of Microelectromechanical Systems
    Volume24
    Issue number4
    DOIs
    Publication statusPublished - Aug 2015

    Fingerprint

    Distributed Bragg reflectors
    Focal plane arrays
    Optical filters
    Infrared imaging
    MEMS
    Wavelength
    Silicon oxides
    Photodetectors
    Full width at half maximum
    Natural frequencies
    Infrared radiation
    Fabrication
    Silicon
    Sensors

    Cite this

    @article{ca4b889bd4ec456fbd2b6bab145cad81,
    title = "Suspended Large-Area MEMS-Based Optical Filters for Multispectral Shortwave Infrared Imaging Applications",
    abstract = "{\circledC} 1992-2012 IEEE. We present the design, fabrication, and optical and mechanical characterization of silicon-/silicon-oxide-based optical filters and distributed Bragg reflectors in sizes ranging from 500 ~\mu {\rm m} \times 500 ~\mu {\rm m} to 5~{\rm mm} \times 5~{\rm mm}. They are designed to be used in conjunction with either single-element photodetectors or large-area focal plane arrays to realize tunable multispectral sensors or adaptive focal plane arrays in the shortwave infrared wavelength range. Surface optical profile measurements indicate a flatness of the order of 30 nm in the fabricated structures across several millimeters. Single-point spectral measurements on devices show an excellent agreement with simulated optical models, and demonstrate Si-SiOx-Si fixed optical filters with a 94{\%} transmission at 1940 nm with a full-width at half-maximum of 250 nm. Distributed Bragg reflectors demonstrate 90{\%} reflectance across the 1560-2050-nm wavelength range, making them suitable as broadband reflectors. The optical spatial uniformity across a 3-mm \times 3 -mm device shows only a 3{\%} variation across the entire optically active area. Finally, the mechanical resonance characteristic of a 1-mm \times 1 -mm fabricated device shows the lowest resonant frequency of the suspended structure to be 39 kHz, indicating excellent immunity to extraneous low-frequency vibrations. [2014-0278]",
    author = "Dhirendra Tripathi and F. Jiang and Ramin Rafiei and Silva, {K.K.M.B. Dilusha} and Jarek Antoszewski and Mariusz Martyniuk and John Dell and Lorenzo Faraone",
    year = "2015",
    month = "8",
    doi = "10.1109/JMEMS.2014.2385081",
    language = "English",
    volume = "24",
    pages = "1102--1110",
    journal = "Journal of Microelectromechanical Systems",
    issn = "1057-7157",
    publisher = "IEEE, Institute of Electrical and Electronics Engineers",
    number = "4",

    }

    TY - JOUR

    T1 - Suspended Large-Area MEMS-Based Optical Filters for Multispectral Shortwave Infrared Imaging Applications

    AU - Tripathi, Dhirendra

    AU - Jiang, F.

    AU - Rafiei, Ramin

    AU - Silva, K.K.M.B. Dilusha

    AU - Antoszewski, Jarek

    AU - Martyniuk, Mariusz

    AU - Dell, John

    AU - Faraone, Lorenzo

    PY - 2015/8

    Y1 - 2015/8

    N2 - © 1992-2012 IEEE. We present the design, fabrication, and optical and mechanical characterization of silicon-/silicon-oxide-based optical filters and distributed Bragg reflectors in sizes ranging from 500 ~\mu {\rm m} \times 500 ~\mu {\rm m} to 5~{\rm mm} \times 5~{\rm mm}. They are designed to be used in conjunction with either single-element photodetectors or large-area focal plane arrays to realize tunable multispectral sensors or adaptive focal plane arrays in the shortwave infrared wavelength range. Surface optical profile measurements indicate a flatness of the order of 30 nm in the fabricated structures across several millimeters. Single-point spectral measurements on devices show an excellent agreement with simulated optical models, and demonstrate Si-SiOx-Si fixed optical filters with a 94% transmission at 1940 nm with a full-width at half-maximum of 250 nm. Distributed Bragg reflectors demonstrate 90% reflectance across the 1560-2050-nm wavelength range, making them suitable as broadband reflectors. The optical spatial uniformity across a 3-mm \times 3 -mm device shows only a 3% variation across the entire optically active area. Finally, the mechanical resonance characteristic of a 1-mm \times 1 -mm fabricated device shows the lowest resonant frequency of the suspended structure to be 39 kHz, indicating excellent immunity to extraneous low-frequency vibrations. [2014-0278]

    AB - © 1992-2012 IEEE. We present the design, fabrication, and optical and mechanical characterization of silicon-/silicon-oxide-based optical filters and distributed Bragg reflectors in sizes ranging from 500 ~\mu {\rm m} \times 500 ~\mu {\rm m} to 5~{\rm mm} \times 5~{\rm mm}. They are designed to be used in conjunction with either single-element photodetectors or large-area focal plane arrays to realize tunable multispectral sensors or adaptive focal plane arrays in the shortwave infrared wavelength range. Surface optical profile measurements indicate a flatness of the order of 30 nm in the fabricated structures across several millimeters. Single-point spectral measurements on devices show an excellent agreement with simulated optical models, and demonstrate Si-SiOx-Si fixed optical filters with a 94% transmission at 1940 nm with a full-width at half-maximum of 250 nm. Distributed Bragg reflectors demonstrate 90% reflectance across the 1560-2050-nm wavelength range, making them suitable as broadband reflectors. The optical spatial uniformity across a 3-mm \times 3 -mm device shows only a 3% variation across the entire optically active area. Finally, the mechanical resonance characteristic of a 1-mm \times 1 -mm fabricated device shows the lowest resonant frequency of the suspended structure to be 39 kHz, indicating excellent immunity to extraneous low-frequency vibrations. [2014-0278]

    U2 - 10.1109/JMEMS.2014.2385081

    DO - 10.1109/JMEMS.2014.2385081

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    ER -