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Abstract
Porosity gradients are a key factor limiting the application of porous silicon (PS) in micromachined structures. In this work, the in-depth porosity profile of PS was studied by measuring the average porosity for samples grown at both constant current density and varied current density; the latter designed to compensate vertical porosity gradient effects. For constant current density, the results showed that the porosity increases from the top surface toward the Si/PS interface. This result is applicable to samples less than 4-mu m thick. The varied current density investigations with current density reduced over the duration of anodisation indicated that two recipes at Delta I = 10 & 12 mA/cm(2) resulted in a relatively low porosity gradient and low tensile residual stress. Using these two recipes, released MEMS-based PS microstructures were fabricated. The results showed that the recipe using a current density variation of Delta I = 10 mA/cm(2) (where I-initial = 20 mA/cm(2) and I-final = 10 mA/cm(2)) was the best approach to produce microstructures with a peak to valley (PV) flatness of 200 nm. This study provides a pathway to create released, MEMS-based resonant cavity optical devices using only a single material (Si) platform.
Original language | English |
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Title of host publication | 2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018 |
Publisher | IEEE, Institute of Electrical and Electronics Engineers |
Pages | 1-4 |
Number of pages | 4 |
ISBN (Electronic) | 9781538695241 |
DOIs | |
Publication status | Published - 2 Jul 2018 |
Event | 2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018 - Perth, Australia Duration: 9 Dec 2018 → 13 Dec 2018 |
Publication series
Name | 2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018 |
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Conference
Conference | 2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018 |
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Country/Territory | Australia |
City | Perth |
Period | 9/12/18 → 13/12/18 |
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Dive into the research topics of 'Study of Porosity Gradient in Released Porous Silicon Microstructures'. Together they form a unique fingerprint.Projects
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A new technology platform for high speed, high sensitivity thermal imaging
Keating, A. (Investigator 01), Parish, G. (Investigator 02), Dell, J. (Investigator 03) & Andrews, G. (Investigator 04)
ARC Australian Research Council
1/01/17 → 30/04/20
Project: Research