Study of Pd/Au metallisation and surface characteristics on Mg-doped GaN induced by low power inductively coupled plasma etching

A. Baharin, Martin Kocan, U. Mishra, Giacinta Parish, Brett Nener

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@article{29d630b7e9624ef0bf7d4eeb9e0b6ad6,

title = "Study of Pd/Au metallisation and surface characteristics on Mg-doped GaN induced by low power inductively coupled plasma etching",

author = "A. Baharin and Martin Kocan and U. Mishra and Giacinta Parish and Brett Nener",

year = "2010",

doi = "10.1016/j.optmat.2009.04.014",

language = "English",

volume = "32",

pages = "700--702",

journal = "Optical Materials",

issn = "0925-3467",

publisher = "Elsevier",

}

TY - JOUR

T1 - Study of Pd/Au metallisation and surface characteristics on Mg-doped GaN induced by low power inductively coupled plasma etching

AU - Baharin, A.

AU - Kocan, Martin

AU - Mishra, U.

AU - Parish, Giacinta

AU - Nener, Brett

PY - 2010

Y1 - 2010

U2 - 10.1016/j.optmat.2009.04.014

DO - 10.1016/j.optmat.2009.04.014

M3 - Article

SN - 0925-3467

VL - 32

SP - 700

EP - 702

JO - Optical Materials

JF - Optical Materials

ER -