Study of Interface Formation of the High-K Dielectric Thin Films Grown on SiO2/Si Substrates

Research output: Chapter in Book/Conference paper › Conference paper

Original language	English
Title of host publication	Joint AXAA(WA) and WASEM Conference
Editors	M. Saunders, R.D. Hart, P. Fallon, P.L. Clode
Place of Publication	Western Australia
Publisher	Australain X-ray Analytical Association-WA
Pages	Not available
Volume	0
Edition	Wooroloo
ISBN (Print)	0958603936
Publication status	Published - 2003
Event	Study of Interface Formation of the High-K Dielectric Thin Films Grown on SiO2/Si Substrates - Wooroloo Duration: 1 Jan 2003 → …

Conference	Study of Interface Formation of the High-K Dielectric Thin Films Grown on SiO2/Si Substrates
Period	1/01/03 → …

Cite this

@inproceedings{9369e1638a5c4b70b46fa1542f0a3a9e,

title = "Study of Interface Formation of the High-K Dielectric Thin Films Grown on SiO2/Si Substrates",

author = "Alexandra Suvorova and Martin Saunders and N.A. Suvorova and E.A. Irene",

year = "2003",

language = "English",

isbn = "0958603936",

volume = "0",

pages = "Not available",

editor = "M. Saunders and R.D. Hart and P. Fallon and P.L. Clode",

booktitle = "Joint AXAA(WA) and WASEM Conference",

publisher = "Australain X-ray Analytical Association-WA",

edition = "Wooroloo",

note = "Study of Interface Formation of the High-K Dielectric Thin Films Grown on SiO2/Si Substrates ; Conference date: 01-01-2003",

}

Suvorova, A , Saunders, M, Suvorova, NA & Irene, EA 2003, Study of Interface Formation of the High-K Dielectric Thin Films Grown on SiO2/Si Substrates. in M Saunders, RD Hart, P Fallon & PL Clode (eds), Joint AXAA(WA) and WASEM Conference. Wooroloo edn, vol. 0, Australain X-ray Analytical Association-WA, Western Australia, pp. Not available, Study of Interface Formation of the High-K Dielectric Thin Films Grown on SiO2/Si Substrates, 1/01/03.

Study of Interface Formation of the High-K Dielectric Thin Films Grown on SiO2/Si Substrates. / Suvorova, Alexandra ; Saunders, Martin; Suvorova, N.A. et al.
Joint AXAA(WA) and WASEM Conference. ed. / M. Saunders; R.D. Hart; P. Fallon; P.L. Clode. Vol. 0 Wooroloo. ed. Western Australia: Australain X-ray Analytical Association-WA, 2003. p. Not available.

Research output: Chapter in Book/Conference paper › Conference paper

TY - GEN

T1 - Study of Interface Formation of the High-K Dielectric Thin Films Grown on SiO2/Si Substrates

AU - Suvorova, Alexandra

AU - Saunders, Martin

AU - Suvorova, N.A.

AU - Irene, E.A.

PY - 2003

Y1 - 2003

M3 - Conference paper

SN - 0958603936

VL - 0

SP - Not available

BT - Joint AXAA(WA) and WASEM Conference

A2 - Saunders, M.

A2 - Hart, R.D.

A2 - Fallon, P.

A2 - Clode, P.L.

PB - Australain X-ray Analytical Association-WA

CY - Western Australia

T2 - Study of Interface Formation of the High-K Dielectric Thin Films Grown on SiO2/Si Substrates

Y2 - 1 January 2003

ER -