Study of interface formation of (Ba,Sr)TiO3 thin films grown by rf sputter deposition on bare Si and thermal SiO2/Si substrates

N. A. Suvorova, A. H. Mueller, A. A. Suvorova, M. Saunders, E. A. Irene

Research output: Contribution to journalConference articlepeer-review

Fingerprint

Dive into the research topics of 'Study of interface formation of (Ba,Sr)TiO3 thin films grown by rf sputter deposition on bare Si and thermal SiO2/Si substrates'. Together they form a unique fingerprint.

Material Science

Engineering