Abstract
This paper reports the characterization of low temperature PECVD thin films as structural materials for NEMS/MEMS devices. Both silicon nitride and silicon carbide films deposited at relatively low temperatures exhibited much lower mechanical properties, compared to their respective bulk counterparts. Fourier transformation infrared spectra and energy dispersion spectra of the silicon nitride films indicated that the ratios of Si-N bonds in the films were strongly influenced by the deposition temperature, which should be attributed to the increase in its mechanical properties.
Original language | English |
---|---|
Title of host publication | Proceedings of the 2006 International Conference on Nanoscience and Nanotechnology, ICONN |
Pages | 713-716 |
Number of pages | 4 |
DOIs | |
Publication status | Published - 2006 |
Event | 2006 International Conference on Nanoscience and Nanotechnology, ICONN 2006 - Brisbane, Australia Duration: 3 Jul 2006 → 6 Jul 2006 http://www.ausnano.net/iconn2006/ |
Publication series
Name | Proceedings of the 2006 International Conference on Nanoscience and Nanotechnology, ICONN |
---|
Conference
Conference | 2006 International Conference on Nanoscience and Nanotechnology, ICONN 2006 |
---|---|
Abbreviated title | ICONN 2006 |
Country/Territory | Australia |
City | Brisbane |
Period | 3/07/06 → 6/07/06 |
Other | The aim of the 2006 International Conference On Nanoscience and Nanotechnology (ICONN 2006) is to bring together the Australian and International community (students, scientists and engineers from academia, govt. laboratories and industry) working in the field of nanoscale science and technology to discuss new and exciting advances in the field. ICONN will cover nanostructure growth, synthesis, fabrication, characterization, device design, modeling, fabrication, testing and applications. The conference will feature plenary talks followed by technical symposia (parallel sessions) consisting of invited talks, oral and poster presentations on the following topics. Nanomaterials including Nanocrystals, Nanotubes (carbon and inorganic), Nanowires Bio-Nanotechnology, Nano-Medicine and Nanobionics Nanoelectronics, Spintronics, Nano-Magnetics, Quantum computing Molecular and Organic Electronics, Organic Displays Nano-Optics, Nano-Optoelectronics, Nano-Photonics Nano-membranes, Nano-porous and Electrochemical Materials Nano-fabrication, Nano-lithography, Nano-manipulation Nanoscale Characterisation, Nano-imaging Computational Nanotechnology (Modelling and Simulation of Nanostructures) Nano-MEMS, Nano-Fluidics, Nano-Actuators, Nano-Sensors, Nano-Robotics, NanoSystems Nano-Manufacturing, Reliability, Standards, Safety and Ethical issues Education, Training and Skills in Nanotechnology |
Internet address |