Structural materials for NEMS/MEMS devices

H. Huang, Y. Q. Wu, K. J. Winchester, A. Suvorova, J. M. Dell, J. Zou, L. Faraone

Research output: Chapter in Book/Conference paperConference paperpeer-review

Abstract

This paper reports the characterization of low temperature PECVD thin films as structural materials for NEMS/MEMS devices. Both silicon nitride and silicon carbide films deposited at relatively low temperatures exhibited much lower mechanical properties, compared to their respective bulk counterparts. Fourier transformation infrared spectra and energy dispersion spectra of the silicon nitride films indicated that the ratios of Si-N bonds in the films were strongly influenced by the deposition temperature, which should be attributed to the increase in its mechanical properties.

Original languageEnglish
Title of host publicationProceedings of the 2006 International Conference on Nanoscience and Nanotechnology, ICONN
Pages713-716
Number of pages4
DOIs
Publication statusPublished - 2006
Event2006 International Conference on Nanoscience and Nanotechnology, ICONN 2006 - Brisbane, Australia
Duration: 3 Jul 20066 Jul 2006
http://www.ausnano.net/iconn2006/

Publication series

NameProceedings of the 2006 International Conference on Nanoscience and Nanotechnology, ICONN

Conference

Conference2006 International Conference on Nanoscience and Nanotechnology, ICONN 2006
Abbreviated titleICONN 2006
Country/TerritoryAustralia
CityBrisbane
Period3/07/066/07/06
OtherThe aim of the 2006 International Conference On Nanoscience and Nanotechnology (ICONN 2006) is to bring together the Australian and International community (students, scientists and engineers from academia, govt. laboratories and industry) working in the field of nanoscale science and technology to discuss new and exciting advances in the field. ICONN will cover nanostructure growth, synthesis, fabrication, characterization, device design, modeling, fabrication, testing and applications. The conference will feature plenary talks followed by technical symposia (parallel sessions) consisting of invited talks, oral and poster presentations on the following topics.

Nanomaterials including Nanocrystals, Nanotubes (carbon and inorganic), Nanowires
Bio-Nanotechnology, Nano-Medicine and Nanobionics
Nanoelectronics, Spintronics, Nano-Magnetics, Quantum computing
Molecular and Organic Electronics, Organic Displays
Nano-Optics, Nano-Optoelectronics, Nano-Photonics
Nano-membranes, Nano-porous and Electrochemical Materials
Nano-fabrication, Nano-lithography, Nano-manipulation
Nanoscale Characterisation, Nano-imaging
Computational Nanotechnology (Modelling and Simulation of Nanostructures)
Nano-MEMS, Nano-Fluidics, Nano-Actuators, Nano-Sensors, Nano-Robotics, NanoSystems
Nano-Manufacturing, Reliability, Standards, Safety and Ethical issues
Education, Training and Skills in Nanotechnology
Internet address

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