Structural and compositional complexity of nitrogen implantation in silicon carbide

Alexandra Suvorova, S. Rubanov, A.V. Suvorov

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Original language	English
Pages (from-to)	462-465
Journal	NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Volume	272
DOIs	https://doi.org/10.1016/j.nimb.2011.01.124
Publication status	Published - 2012

Access to Document

@article{3b5cc61d309c4b0db1795e2e02411ab2,

title = "Structural and compositional complexity of nitrogen implantation in silicon carbide",

author = "Alexandra Suvorova and S. Rubanov and A.V. Suvorov",

year = "2012",

doi = "10.1016/j.nimb.2011.01.124",

language = "English",

volume = "272",

pages = "462--465",

journal = "NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS",

issn = "0168-583X",

publisher = "Elsevier",

}

TY - JOUR

T1 - Structural and compositional complexity of nitrogen implantation in silicon carbide

AU - Suvorova, Alexandra

AU - Rubanov, S.

AU - Suvorov, A.V.

PY - 2012

Y1 - 2012

U2 - 10.1016/j.nimb.2011.01.124

DO - 10.1016/j.nimb.2011.01.124

M3 - Article

SN - 0168-583X

VL - 272

SP - 462

EP - 465

JO - NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

JF - NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

ER -