Structural and compositional complexity of nitrogen implantation in silicon carbide

Alexandra Suvorova, S. Rubanov, A.V. Suvorov

Research output: Contribution to journalArticle

3 Citations (Scopus)
Original languageEnglish
Pages (from-to)462-465
JournalNUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Volume272
DOIs
Publication statusPublished - 2012

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