Structural and compositional characterization of LiF thin films on Si

Research output: Chapter in Book/Conference paperConference paperpeer-review

Abstract

LiF thin films deposited on Si substrates have been found to exhibit interesting electronic properties that are dependent on the film thickness. The structural and compositional properties of LiF films have been studied via a combination of SEM imaging and TEM diffraction and energy-selected imaging in an attempt to correlate the structural, compositional and electronic properties of the films.

Original languageEnglish
Title of host publicationElectron Microscopy & Analysis 2003: Proceedings of the Institute of Physics Electron Microscopy & Analysis Group Conf.
EditorsS. McVitie, D. McComb
Place of PublicationBristol
PublisherInstitute of Physics Publishing
Pages57-60
Number of pages4
Volume179
EditionThe University of Oxford
ISBN (Print)0750309679
Publication statusPublished - 2004
EventElectron Microscopy and Analysis 2003 - Proceedings of the Institute of Physics Electron Microscopy and Analysis Group Conference - Oxford, United Kingdom
Duration: 3 Sept 20035 Sept 2003

Publication series

NameInstitute of Physics Conference Series
PublisherIOP Publishing
ISSN (Print)0951-3248

Conference

ConferenceElectron Microscopy and Analysis 2003 - Proceedings of the Institute of Physics Electron Microscopy and Analysis Group Conference
Country/TerritoryUnited Kingdom
CityOxford
Period3/09/035/09/03

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