Stress control of porous silicon film for microelectromechanical systems

Research output: Chapter in Book/Conference paper › Conference paper › peer-review

Original language	English
Title of host publication	Conference on Optoelectronic and Microelectronic Materials and Devices (COMMAD)
Place of Publication	Perth, Australia
Publisher	IEEE, Institute of Electrical and Electronics Engineers
Pages	214-216
Volume	1
ISBN (Electronic)	978-1-4799-6867-1
ISBN (Print)	9781
DOIs	https://doi.org/10.1109/COMMAD.2014.7038693
Publication status	Published - 2014
Event	Stress control of porous silicon film for microelectromechanical systems - Perth, Australia Duration: 1 Jan 2014 → …

Conference	Stress control of porous silicon film for microelectromechanical systems
Period	1/01/14 → …

Access to Document

@inproceedings{61144c7907d14e049dde3607573f505d,

title = "Stress control of porous silicon film for microelectromechanical systems",

author = "Xiao Sun and Adrian Keating and Giacinta Parish",

year = "2014",

doi = "10.1109/COMMAD.2014.7038693",

language = "English",

isbn = "9781",

volume = "1",

pages = "214--216",

booktitle = "Conference on Optoelectronic and Microelectronic Materials and Devices (COMMAD)",

publisher = "IEEE, Institute of Electrical and Electronics Engineers",

address = "United States",

note = "Stress control of porous silicon film for microelectromechanical systems ; Conference date: 01-01-2014",

}

Sun, X , Keating, A & Parish, G 2014, Stress control of porous silicon film for microelectromechanical systems. in Conference on Optoelectronic and Microelectronic Materials and Devices (COMMAD). vol. 1, IEEE, Institute of Electrical and Electronics Engineers, Perth, Australia, pp. 214-216, Stress control of porous silicon film for microelectromechanical systems, 1/01/14. https://doi.org/10.1109/COMMAD.2014.7038693

Stress control of porous silicon film for microelectromechanical systems. / Sun, Xiao ; Keating, Adrian ; Parish, Giacinta.
Conference on Optoelectronic and Microelectronic Materials and Devices (COMMAD). Vol. 1 Perth, Australia: IEEE, Institute of Electrical and Electronics Engineers, 2014. p. 214-216.

Research output: Chapter in Book/Conference paper › Conference paper › peer-review

TY - GEN

T1 - Stress control of porous silicon film for microelectromechanical systems

AU - Sun, Xiao

AU - Keating, Adrian

AU - Parish, Giacinta

PY - 2014

Y1 - 2014

U2 - 10.1109/COMMAD.2014.7038693

DO - 10.1109/COMMAD.2014.7038693

M3 - Conference paper

SN - 9781

VL - 1

SP - 214

EP - 216

BT - Conference on Optoelectronic and Microelectronic Materials and Devices (COMMAD)

PB - IEEE, Institute of Electrical and Electronics Engineers

CY - Perth, Australia

T2 - Stress control of porous silicon film for microelectromechanical systems

Y2 - 1 January 2014

ER -