@inproceedings{f8869ca382384d9886aea209ab305cf4,
title = "Standard photolithography compatible process released porous silicon microbeams with low stress, uniform porosity",
author = "Xiao Sun and Adrian Keating and Giacinta Parish",
year = "2014",
language = "English",
volume = "1",
pages = "1--2",
booktitle = "The 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies APCOT 2014",
publisher = "TBC",
note = "Standard photolithography compatible process released porous silicon microbeams with low stress, uniform porosity ; Conference date: 01-01-2014",
}