Standard photolithography compatible process released porous silicon microbeams with low stress, uniform porosity

Research output: Chapter in Book/Conference paperConference paper

Original languageEnglish
Title of host publicationThe 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies APCOT 2014
Place of PublicationSouth Korea
PublisherTBC
Pages1-2
Volume1
Publication statusPublished - 2014
EventStandard photolithography compatible process released porous silicon microbeams with low stress, uniform porosity - South Korea
Duration: 1 Jan 2014 → …

Conference

ConferenceStandard photolithography compatible process released porous silicon microbeams with low stress, uniform porosity
Period1/01/14 → …

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