Solution photochemistry of poly(dialkylsilanes): A new class of photoresists

J MICHL, JW DOWNING, T KARATSU, AJ MCKINLEY, G POGGI, GM WALLRAFF, R SOORIYAKUMARAN, RD MILLER

Research output: Contribution to journalArticlepeer-review

83 Citations (Scopus)
Original languageEnglish
Pages (from-to)959-972
Number of pages14
JournalPure and Applied Chemistry
Volume60
Issue number7
DOIs
Publication statusPublished - Jul 1988

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