Abstract
We report the fabrication of junctionless SOI MOSFETs. Such devices greatly simplify processing thermal budget and behave as regular multigate SOI transistors.
Original language | English |
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Title of host publication | 2009 IEEE INTERNATIONAL SOI CONFERENCE |
Publisher | Wiley-IEEE Press |
Pages | 137-138 |
Number of pages | 2 |
ISBN (Print) | 978-1-4244-4256-0 |
Publication status | Published - 2009 |
Event | IEEE International SOI Conference 2009 - Foster City, Canada Duration: 5 Oct 2009 → 8 Oct 2009 |
Conference
Conference | IEEE International SOI Conference 2009 |
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Country/Territory | Canada |
City | Foster City |
Period | 5/10/09 → 8/10/09 |