Abstract
In nature, there exist numerous and diverse, highly sensitive and well-evolved biological hair cell sensors which work on the principles of mechanotransduction, serving various sensing needs. This work presents a flexible biomimetic smart skin of self-powered piezoelectric hair cell flow sensors capable of sensing underwater flow phenomena. We developed a 2D array of 20 MEMS flow sensors arranged in a 4×5 pattern spanning a foot-print of 30mm×40mm. Experimental results demonstrate the ability of individual sensors to detect flow velocities as low as 8.24μm/s. The array is capable of determining the location, and distance of an underwater stimulus with an error below 1%. © 2015 IEEE.
Original language | English |
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Title of host publication | 2015 Transducers - 18th International Conference on Solid-State Sensors, Actuators and Microsystems |
Editors | Thomas Kenny, Victor Bright |
Place of Publication | Alaska |
Publisher | IEEE, Institute of Electrical and Electronics Engineers |
Pages | 387-390 |
Number of pages | 4 |
DOIs | |
Publication status | Published - 2015 |
Externally published | Yes |
Event | 18th International Conference on Solid-State Sensors, Actuators and Microsystems: TRANSDUCERS 2015 - Anchorage, United States Duration: 21 Jun 2016 → 25 Jun 2016 |
Conference
Conference | 18th International Conference on Solid-State Sensors, Actuators and Microsystems |
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Country/Territory | United States |
City | Anchorage |
Period | 21/06/16 → 25/06/16 |