Simple Wet Etching of GaN

Giacinta Parish, P. Scali, S.M.R. Spaargaren, Brett Nener

Research output: Chapter in Book/Conference paper › Conference paper › peer-review

Original language	English
Title of host publication	SPIE Proceedings on Device and Process Technologies for MEMS and Microelectronics II
Editors	J.-C. Chiao
Place of Publication	Adelaide, Australia
Publisher	SPIE
Pages	104-110
Volume	4592
Edition	Adelaide, South Australia
ISBN (Print)	0819443220
Publication status	Published - 2001
Event	Simple Wet Etching of GaN - Adelaide, South Australia Duration: 1 Jan 2001 → …

Conference	Simple Wet Etching of GaN
Period	1/01/01 → …

Cite this

@inproceedings{f573ffc295164c6f832bb35d7ebf7d7e,

title = "Simple Wet Etching of GaN",

author = "Giacinta Parish and P. Scali and S.M.R. Spaargaren and Brett Nener",

year = "2001",

language = "English",

isbn = "0819443220",

volume = "4592",

pages = "104--110",

editor = "J.-C. Chiao",

booktitle = "SPIE Proceedings on Device and Process Technologies for MEMS and Microelectronics II",

publisher = "SPIE",

address = "United States",

edition = "Adelaide, South Australia",

note = "Simple Wet Etching of GaN ; Conference date: 01-01-2001",

}

TY - GEN

T1 - Simple Wet Etching of GaN

AU - Parish, Giacinta

AU - Scali, P.

AU - Spaargaren, S.M.R.

AU - Nener, Brett

PY - 2001

Y1 - 2001

M3 - Conference paper

SN - 0819443220

VL - 4592

SP - 104

EP - 110

BT - SPIE Proceedings on Device and Process Technologies for MEMS and Microelectronics II

A2 - Chiao, J.-C.

PB - SPIE

CY - Adelaide, Australia

T2 - Simple Wet Etching of GaN

Y2 - 1 January 2001

ER -