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Silicon-based optical MEMS for visible to mid-wave infrared wavelengths
Dhirendra Kumar Tripathi
Research output
:
Thesis
›
Doctoral Thesis
464
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Dive into the research topics of 'Silicon-based optical MEMS for visible to mid-wave infrared wavelengths'. Together they form a unique fingerprint.
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Engineering
Microelectromechanical System
100%
Distributed Bragg reflectors
100%
Full width at half maximum
62%
Thin film silicon
37%
Deposition Temperature
25%
Actuation
25%
Reflectance
25%
Two Dimensional
12%
Experimental Work
12%
High Tensile Stress
12%
Quarter Wavelength
12%
Research Group
12%
Microelectronics
12%
Fabry Perot
12%
Building Block
12%
Planers
12%
Residual Stress
12%
Plane Stress
12%
Measured Spectrum
12%
Refractive Index
12%
Thin Films
12%
Optical Transmission
12%
Film Silicon
12%
Extinction Coefficient
12%
Silicon Oxide
12%
Australia
12%
Refractivity
12%
Material Science
Microelectromechanical System
100%
Silicon
100%
Thin Films
23%
Film
11%
Surface (Surface Science)
11%
Residual Stress
5%
Mechanical Testing
5%
Annealing
5%
Refractive Index
5%
Ultimate Tensile Strength
5%
Optical Property
5%
Oxide Compound
5%
Structural Design
5%