Fingerprint
Dive into the research topics of 'Silicon and Silicon dioxide thin films deposited by ICPCVD at low temperature and high rate for MEMS applications'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Silicon and Silicon dioxide thin films deposited by ICPCVD at low temperature and high rate for MEMS applications
Praveen K. Revuri, D. K. Tripathi, M. Martyniuk, K. K.M.B.D. Silva, G. Putrino, Adrian Keating, L. Faraone
Research output: Chapter in Book/Conference paper › Conference paper › peer-review
4
Citations
(Scopus)