Silicon-Air-Silicon Distributed Bragg Reflectors for Visible and Near Infrared Optical MEMS

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Abstract

© 1992-2012 IEEE. This letter presents the design, fabrication, and optical characterization of silicon-air-silicon-based surface micro-machined distributed Bragg reflectors (DBRs) for the visible to near infrared wavelength range (540-960 nm). The DBR (mirror) consisted of two quarter wave thick silicon films separated by a quarter-wave air gap. A mirror array was successfully fabricated, consisting of mirrors ranging in diameter between 270 and 420 μm. Calibrated optical measurements indicate that a peak reflectivity close to 92% has been achieved for visible wavelengths, despite the fact that silicon has strong absorbtion in the visible wavelength range. The mirrors are shown to be broadband reflectors, having 85% or more reflectivity over a 160-nm wavelength range. A spatially resolved optical transmission mapping and optical transmission profile of the mirrors demonstrates high uniformity across the fabricated array of DBRs. [2015-0140].
Original languageEnglish
Pages (from-to)1245-1247
JournalJournal of Microelectromechanical Systems
Volume24
Issue number5
DOIs
Publication statusPublished - 2015

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MOEMS
Distributed Bragg reflectors
Infrared radiation
Silicon
Wavelength
Light transmission
Air
Mirrors
Fabrication

Cite this

@article{e15ae9ebdd15485ebb1767bc77bfa831,
title = "Silicon-Air-Silicon Distributed Bragg Reflectors for Visible and Near Infrared Optical MEMS",
abstract = "{\circledC} 1992-2012 IEEE. This letter presents the design, fabrication, and optical characterization of silicon-air-silicon-based surface micro-machined distributed Bragg reflectors (DBRs) for the visible to near infrared wavelength range (540-960 nm). The DBR (mirror) consisted of two quarter wave thick silicon films separated by a quarter-wave air gap. A mirror array was successfully fabricated, consisting of mirrors ranging in diameter between 270 and 420 μm. Calibrated optical measurements indicate that a peak reflectivity close to 92{\%} has been achieved for visible wavelengths, despite the fact that silicon has strong absorbtion in the visible wavelength range. The mirrors are shown to be broadband reflectors, having 85{\%} or more reflectivity over a 160-nm wavelength range. A spatially resolved optical transmission mapping and optical transmission profile of the mirrors demonstrates high uniformity across the fabricated array of DBRs. [2015-0140].",
author = "Dhirendra Tripathi and Dilusha Silva and John Bumgarner and R. Rafiei and Mariusz Martyniuk and John Dell and Lorenzo Faraone",
year = "2015",
doi = "10.1109/JMEMS.2015.2459076",
language = "English",
volume = "24",
pages = "1245--1247",
journal = "Journal of Microelectromechanical Systems",
issn = "1057-7157",
publisher = "IEEE, Institute of Electrical and Electronics Engineers",
number = "5",

}

TY - JOUR

T1 - Silicon-Air-Silicon Distributed Bragg Reflectors for Visible and Near Infrared Optical MEMS

AU - Tripathi, Dhirendra

AU - Silva, Dilusha

AU - Bumgarner, John

AU - Rafiei, R.

AU - Martyniuk, Mariusz

AU - Dell, John

AU - Faraone, Lorenzo

PY - 2015

Y1 - 2015

N2 - © 1992-2012 IEEE. This letter presents the design, fabrication, and optical characterization of silicon-air-silicon-based surface micro-machined distributed Bragg reflectors (DBRs) for the visible to near infrared wavelength range (540-960 nm). The DBR (mirror) consisted of two quarter wave thick silicon films separated by a quarter-wave air gap. A mirror array was successfully fabricated, consisting of mirrors ranging in diameter between 270 and 420 μm. Calibrated optical measurements indicate that a peak reflectivity close to 92% has been achieved for visible wavelengths, despite the fact that silicon has strong absorbtion in the visible wavelength range. The mirrors are shown to be broadband reflectors, having 85% or more reflectivity over a 160-nm wavelength range. A spatially resolved optical transmission mapping and optical transmission profile of the mirrors demonstrates high uniformity across the fabricated array of DBRs. [2015-0140].

AB - © 1992-2012 IEEE. This letter presents the design, fabrication, and optical characterization of silicon-air-silicon-based surface micro-machined distributed Bragg reflectors (DBRs) for the visible to near infrared wavelength range (540-960 nm). The DBR (mirror) consisted of two quarter wave thick silicon films separated by a quarter-wave air gap. A mirror array was successfully fabricated, consisting of mirrors ranging in diameter between 270 and 420 μm. Calibrated optical measurements indicate that a peak reflectivity close to 92% has been achieved for visible wavelengths, despite the fact that silicon has strong absorbtion in the visible wavelength range. The mirrors are shown to be broadband reflectors, having 85% or more reflectivity over a 160-nm wavelength range. A spatially resolved optical transmission mapping and optical transmission profile of the mirrors demonstrates high uniformity across the fabricated array of DBRs. [2015-0140].

U2 - 10.1109/JMEMS.2015.2459076

DO - 10.1109/JMEMS.2015.2459076

M3 - Article

VL - 24

SP - 1245

EP - 1247

JO - Journal of Microelectromechanical Systems

JF - Journal of Microelectromechanical Systems

SN - 1057-7157

IS - 5

ER -