SAW-based gas sensors with rf sputtered InOx and PECVD SiNx films: Response to H2 and O3 gases
- A.C. Fechete
- , W. Wlodarski
- , K. Kalantar-Zadeh
- , A.S. Holland
- , Jarek Antoszewski
- , S. Kaciulis
- , L. Pandolfi
Research output: Contribution to journal › Article › peer-review
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