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SAW-based gas sensors with rf sputtered InOx and PECVD SiNx films: Response to H2 and O3 gases
A.C. Fechete, W. Wlodarski, K. Kalantar-Zadeh, A.S. Holland, Jarek Antoszewski, S. Kaciulis, L. Pandolfi
Research output: Contribution to journal › Article › peer-review
22
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(Scopus)