Released micromachined beams utilizing low stress, uniform porosity porous silicon

    Research output: Contribution to conferenceAbstract

    Abstract

    Suspended micromachined porous silicon (PS) beams with low stress and uniform porosity are reported, based on standard CMOS compatible photolithography processes. Anodisation, RIE, repeated photolithography, lift off and electropolishing were used to release defined PS microbeams on a Si substrate. Excellent agreement with theoretical models allows both Young’s modulus and stress to be extracted from resonant measurements of the vibrating microbeams.
    Original languageEnglish
    Publication statusPublished - 2014
    EventPorous Semiconductors - Science and Technology PSST 2014 - Hotel Melia, Benidorm, Spain
    Duration: 9 Mar 201414 Mar 2014
    http://the-psst.com/index.php?conference=PSST&schedConf=2014

    Conference

    ConferencePorous Semiconductors - Science and Technology PSST 2014
    CountrySpain
    CityBenidorm
    Period9/03/1414/03/14
    Internet address

    Fingerprint

    microbeams
    photolithography
    porous silicon
    electropolishing
    porosity
    modulus of elasticity
    CMOS

    Cite this

    Sun, X., Keating, A., & Parish, G. (2014). Released micromachined beams utilizing low stress, uniform porosity porous silicon. Abstract from Porous Semiconductors - Science and Technology PSST 2014, Benidorm, Spain.
    Sun, Xiao ; Keating, Adrian ; Parish, Giacinta. / Released micromachined beams utilizing low stress, uniform porosity porous silicon. Abstract from Porous Semiconductors - Science and Technology PSST 2014, Benidorm, Spain.
    @conference{dc6fabdce1dc4d6abbbf0bde47f08e99,
    title = "Released micromachined beams utilizing low stress, uniform porosity porous silicon",
    abstract = "Suspended micromachined porous silicon (PS) beams with low stress and uniform porosity are reported, based on standard CMOS compatible photolithography processes. Anodisation, RIE, repeated photolithography, lift off and electropolishing were used to release defined PS microbeams on a Si substrate. Excellent agreement with theoretical models allows both Young’s modulus and stress to be extracted from resonant measurements of the vibrating microbeams.",
    author = "Xiao Sun and Adrian Keating and Giacinta Parish",
    year = "2014",
    language = "English",
    note = "Porous Semiconductors - Science and Technology PSST 2014 ; Conference date: 09-03-2014 Through 14-03-2014",
    url = "http://the-psst.com/index.php?conference=PSST&schedConf=2014",

    }

    Sun, X, Keating, A & Parish, G 2014, 'Released micromachined beams utilizing low stress, uniform porosity porous silicon' Porous Semiconductors - Science and Technology PSST 2014, Benidorm, Spain, 9/03/14 - 14/03/14, .

    Released micromachined beams utilizing low stress, uniform porosity porous silicon. / Sun, Xiao; Keating, Adrian; Parish, Giacinta.

    2014. Abstract from Porous Semiconductors - Science and Technology PSST 2014, Benidorm, Spain.

    Research output: Contribution to conferenceAbstract

    TY - CONF

    T1 - Released micromachined beams utilizing low stress, uniform porosity porous silicon

    AU - Sun, Xiao

    AU - Keating, Adrian

    AU - Parish, Giacinta

    PY - 2014

    Y1 - 2014

    N2 - Suspended micromachined porous silicon (PS) beams with low stress and uniform porosity are reported, based on standard CMOS compatible photolithography processes. Anodisation, RIE, repeated photolithography, lift off and electropolishing were used to release defined PS microbeams on a Si substrate. Excellent agreement with theoretical models allows both Young’s modulus and stress to be extracted from resonant measurements of the vibrating microbeams.

    AB - Suspended micromachined porous silicon (PS) beams with low stress and uniform porosity are reported, based on standard CMOS compatible photolithography processes. Anodisation, RIE, repeated photolithography, lift off and electropolishing were used to release defined PS microbeams on a Si substrate. Excellent agreement with theoretical models allows both Young’s modulus and stress to be extracted from resonant measurements of the vibrating microbeams.

    UR - http://the-psst.com/index.php?conference=PSST&schedConf=2014&page=paper&op=view&path%5B%5D=149

    UR - http://the-psst.com/index.php?conference=PSST&schedConf=2014&page=schedConf&op=presentations

    M3 - Abstract

    ER -

    Sun X, Keating A, Parish G. Released micromachined beams utilizing low stress, uniform porosity porous silicon. 2014. Abstract from Porous Semiconductors - Science and Technology PSST 2014, Benidorm, Spain.