Released all-porous-silicon microstructure for spectrometer applications

Xiao Sun; Yaman Afandi; Giacinta Parish; Adrian Keating

Released all-porous-silicon microstructure for spectrometer applications

Xiao Sun, Yaman Afandi, Giacinta Parish, Adrian Keating

Research output: Contribution to conference › Conference presentation/ephemera › peer-review

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Abstract

All-porous-silicon microstructures have been released with in-situ controllable current density to achieve low residual stress and out-of-plane stress gradient in the porous silicon (PS) films. Optical transmission of large area released PS structures was investigated through both Fourier-transform infrared spectroscopy (FTIR) and modelling in the near infrared and mid infrared wavelength range.

Original language	English
Publication status	Published - 2018
Event	2018 Conference on Optoelectronic and Microelectronic Materials and Devices - Perth, Australia Duration: 9 Dec 2018 → 13 Dec 2018

Conference

Conference	2018 Conference on Optoelectronic and Microelectronic Materials and Devices
Country/Territory	Australia
City	Perth
Period	9/12/18 → 13/12/18

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Sun et al., 2018 Released all-porous-silicon microstructure for spectrometer applicationsProof, 544 KB

A new technology platform for high speed, high sensitivity thermal imaging
Keating, A. (Investigator 01), Parish, G. (Investigator 02), Dell, J. (Investigator 03) & Andrews, G. (Investigator 04)
ARC Australian Research Council
1/01/17 → 30/04/20
Project: Research

Cite this

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title = "Released all-porous-silicon microstructure for spectrometer applications",

abstract = " All-porous-silicon microstructures have been released with in-situ controllable current density to achieve low residual stress and out-of-plane stress gradient in the porous silicon (PS) films. Optical transmission of large area released PS structures was investigated through both Fourier-transform infrared spectroscopy (FTIR) and modelling in the near infrared and mid infrared wavelength range. ",

author = "Xiao Sun and Yaman Afandi and Giacinta Parish and Adrian Keating",

year = "2018",

language = "English",

note = "2018 Conference on Optoelectronic and Microelectronic Materials and Devices ; Conference date: 09-12-2018 Through 13-12-2018",

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T1 - Released all-porous-silicon microstructure for spectrometer applications

AU - Sun, Xiao

AU - Afandi, Yaman

AU - Parish, Giacinta

AU - Keating, Adrian

PY - 2018

Y1 - 2018

N2 - All-porous-silicon microstructures have been released with in-situ controllable current density to achieve low residual stress and out-of-plane stress gradient in the porous silicon (PS) films. Optical transmission of large area released PS structures was investigated through both Fourier-transform infrared spectroscopy (FTIR) and modelling in the near infrared and mid infrared wavelength range.

AB - All-porous-silicon microstructures have been released with in-situ controllable current density to achieve low residual stress and out-of-plane stress gradient in the porous silicon (PS) films. Optical transmission of large area released PS structures was investigated through both Fourier-transform infrared spectroscopy (FTIR) and modelling in the near infrared and mid infrared wavelength range.

M3 - Conference presentation/ephemera

T2 - 2018 Conference on Optoelectronic and Microelectronic Materials and Devices

Y2 - 9 December 2018 through 13 December 2018

ER -

Released all-porous-silicon microstructure for spectrometer applications

Abstract

Conference

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A new technology platform for high speed, high sensitivity thermal imaging

Cite this