Released all-porous-silicon microstructure for spectrometer applications

Research output: Contribution to conferenceConference presentation/ephemera

Abstract

All-porous-silicon microstructures have been released with in-situ controllable current density to achieve low residual stress and out-of-plane stress gradient in the porous silicon (PS) films. Optical transmission of large area released PS structures was investigated through both Fourier-transform infrared spectroscopy (FTIR) and modelling in the near infrared and mid infrared wavelength range.
Original languageEnglish
Publication statusPublished - 2018
EventConference on Optoelectronic and Microelectronic Materials & Devices - Perth, Perth, Australia
Duration: 9 Dec 201813 Dec 2018
https://aip2018.org.au/

Conference

ConferenceConference on Optoelectronic and Microelectronic Materials & Devices
CountryAustralia
CityPerth
Period9/12/1813/12/18
Internet address

Fingerprint

porous silicon
spectrometers
microstructure
plane stress
silicon films
residual stress
infrared spectroscopy
current density
gradients
wavelengths

Cite this

Sun, X., Afandi, Y., Parish, G., & Keating, A. (2018). Released all-porous-silicon microstructure for spectrometer applications. Paper presented at Conference on Optoelectronic and Microelectronic Materials & Devices, Perth, Australia.
Sun, Xiao ; Afandi, Yaman ; Parish, Giacinta ; Keating, Adrian. / Released all-porous-silicon microstructure for spectrometer applications. Paper presented at Conference on Optoelectronic and Microelectronic Materials & Devices, Perth, Australia.
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title = "Released all-porous-silicon microstructure for spectrometer applications",
abstract = "All-porous-silicon microstructures have been released with in-situ controllable current density to achieve low residual stress and out-of-plane stress gradient in the porous silicon (PS) films. Optical transmission of large area released PS structures was investigated through both Fourier-transform infrared spectroscopy (FTIR) and modelling in the near infrared and mid infrared wavelength range.",
author = "Xiao Sun and Yaman Afandi and Giacinta Parish and Adrian Keating",
year = "2018",
language = "English",
note = "Conference on Optoelectronic and Microelectronic Materials & Devices ; Conference date: 09-12-2018 Through 13-12-2018",
url = "https://aip2018.org.au/",

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Sun, X, Afandi, Y, Parish, G & Keating, A 2018, 'Released all-porous-silicon microstructure for spectrometer applications' Paper presented at Conference on Optoelectronic and Microelectronic Materials & Devices, Perth, Australia, 9/12/18 - 13/12/18, .

Released all-porous-silicon microstructure for spectrometer applications. / Sun, Xiao; Afandi, Yaman; Parish, Giacinta; Keating, Adrian.

2018. Paper presented at Conference on Optoelectronic and Microelectronic Materials & Devices, Perth, Australia.

Research output: Contribution to conferenceConference presentation/ephemera

TY - CONF

T1 - Released all-porous-silicon microstructure for spectrometer applications

AU - Sun, Xiao

AU - Afandi, Yaman

AU - Parish, Giacinta

AU - Keating, Adrian

PY - 2018

Y1 - 2018

N2 - All-porous-silicon microstructures have been released with in-situ controllable current density to achieve low residual stress and out-of-plane stress gradient in the porous silicon (PS) films. Optical transmission of large area released PS structures was investigated through both Fourier-transform infrared spectroscopy (FTIR) and modelling in the near infrared and mid infrared wavelength range.

AB - All-porous-silicon microstructures have been released with in-situ controllable current density to achieve low residual stress and out-of-plane stress gradient in the porous silicon (PS) films. Optical transmission of large area released PS structures was investigated through both Fourier-transform infrared spectroscopy (FTIR) and modelling in the near infrared and mid infrared wavelength range.

M3 - Conference presentation/ephemera

ER -

Sun X, Afandi Y, Parish G, Keating A. Released all-porous-silicon microstructure for spectrometer applications. 2018. Paper presented at Conference on Optoelectronic and Microelectronic Materials & Devices, Perth, Australia.