Projects per year
All-porous-silicon microstructures have been released with in-situ controllable current density to achieve low residual stress and out-of-plane stress gradient in the porous silicon (PS) films. Optical transmission of large area released PS structures was investigated through both Fourier-transform infrared spectroscopy (FTIR) and modelling in the near infrared and mid infrared wavelength range.
|Publication status||Published - 2018|
|Event||2018 Conference on Optoelectronic and Microelectronic Materials and Devices - Perth, Australia|
Duration: 9 Dec 2018 → 13 Dec 2018
|Conference||2018 Conference on Optoelectronic and Microelectronic Materials and Devices|
|Period||9/12/18 → 13/12/18|