Refinements of Fabrication processes in sputtered double-layer ITO/InP solar cells

Jasmine Henry, John Livingstone

    Research output: Contribution to journalArticlepeer-review

    3 Citations (Scopus)

    Abstract

    A two-layer fabrication technique developed to avoid surface degradation in sputtered indium tin oxide (ITO)/indium phosphide (InP) solar cells, initially provided insight into junction formation mechanisms, and has now been further refined to provide gains in efficiency. A critical parameter is the deposition rate of the first layer (indium tin) onto the InP surface, and it was found that this layer should be deposited at greater than 1A s(1). A major problem was the series resistance and, to improve this, extensive experimental work was carried out into varying the post-deposition annealing procedure of the second film, the ITO layer. Finally, a preliminary study of devices with the first layer electron-beam evaporated was carried out and a comparison between sputtered and electron-beam devices confirmed previous ideas on junction formation mechanisms.
    Original languageEnglish
    Pages (from-to)1025-1035
    JournalInternational Journal of Electronics
    Volume87
    Issue number9
    DOIs
    Publication statusPublished - 2000

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