Recent developments towards low-cost MEMS spectrometers

Research output: Chapter in Book/Conference paperConference paperpeer-review

4 Citations (Scopus)


While optical spectroscopy has shown great promise in a multitude of applications, the cost, size, and fragility of spectrometer instruments have hindered widespread application of the technology.:tvfEMS microspectrometers offer great hope for low-cost, lightweight, and robust spectrometers, paving the way for pervasive use in many fields. In this invited paper, we report on nearly 15 years of development on MEMS spectrometers in our research group, beginning with devices designed for the shortwave infrared (SWIR) and midwave infrared (MWIR), and moving on to our most recent work towards MEMS spectrometers in the visible and near infrared (NIR) as well as the thermal long-wave infrared (LWIR) bands. © 2014 SPIE.
Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
ISBN (Print)9781628410389
Publication statusPublished - 2014
EventRecent developments towards low-cost MEMS spectrometers - Baltimore, USA
Duration: 1 Jan 2014 → …


ConferenceRecent developments towards low-cost MEMS spectrometers
Period1/01/14 → …


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