Recent developments towards low-cost MEMS spectrometers

Dilusha Silva; D.K. Tripathi; H. Mao; Jarek Antoszewski; Brett Nener; John Dell; Lorenzo Faraone

doi:10.1117/12.2053505

Recent developments towards low-cost MEMS spectrometers

Dilusha Silva, D.K. Tripathi, H. Mao, Jarek Antoszewski, Brett Nener, John Dell, Lorenzo Faraone

Graduate Research School

Research output: Chapter in Book/Conference paper › Conference paper › peer-review

4 Citations (Scopus)

Abstract

While optical spectroscopy has shown great promise in a multitude of applications, the cost, size, and fragility of spectrometer instruments have hindered widespread application of the technology.:tvfEMS microspectrometers offer great hope for low-cost, lightweight, and robust spectrometers, paving the way for pervasive use in many fields. In this invited paper, we report on nearly 15 years of development on MEMS spectrometers in our research group, beginning with devices designed for the shortwave infrared (SWIR) and midwave infrared (MWIR), and moving on to our most recent work towards MEMS spectrometers in the visible and near infrared (NIR) as well as the thermal long-wave infrared (LWIR) bands. © 2014 SPIE.

Original language	English
Title of host publication	Proceedings of SPIE - The International Society for Optical Engineering
Publisher	SPIE
Pages	910108
Volume	9101
ISBN (Print)	9781628410389
DOIs	https://doi.org/10.1117/12.2053505
Publication status	Published - 2014
Event	Recent developments towards low-cost MEMS spectrometers - Baltimore, USA Duration: 1 Jan 2014 → …

Conference

Conference	Recent developments towards low-cost MEMS spectrometers
Period	1/01/14 → …

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title = "Recent developments towards low-cost MEMS spectrometers",

abstract = "While optical spectroscopy has shown great promise in a multitude of applications, the cost, size, and fragility of spectrometer instruments have hindered widespread application of the technology.:tvfEMS microspectrometers offer great hope for low-cost, lightweight, and robust spectrometers, paving the way for pervasive use in many fields. In this invited paper, we report on nearly 15 years of development on MEMS spectrometers in our research group, beginning with devices designed for the shortwave infrared (SWIR) and midwave infrared (MWIR), and moving on to our most recent work towards MEMS spectrometers in the visible and near infrared (NIR) as well as the thermal long-wave infrared (LWIR) bands. {\textcopyright} 2014 SPIE.",

author = "Dilusha Silva and D.K. Tripathi and H. Mao and Jarek Antoszewski and Brett Nener and John Dell and Lorenzo Faraone",

year = "2014",

doi = "10.1117/12.2053505",

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booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",

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T1 - Recent developments towards low-cost MEMS spectrometers

AU - Silva, Dilusha

AU - Tripathi, D.K.

AU - Mao, H.

AU - Antoszewski, Jarek

AU - Nener, Brett

AU - Dell, John

AU - Faraone, Lorenzo

PY - 2014

Y1 - 2014

N2 - While optical spectroscopy has shown great promise in a multitude of applications, the cost, size, and fragility of spectrometer instruments have hindered widespread application of the technology.:tvfEMS microspectrometers offer great hope for low-cost, lightweight, and robust spectrometers, paving the way for pervasive use in many fields. In this invited paper, we report on nearly 15 years of development on MEMS spectrometers in our research group, beginning with devices designed for the shortwave infrared (SWIR) and midwave infrared (MWIR), and moving on to our most recent work towards MEMS spectrometers in the visible and near infrared (NIR) as well as the thermal long-wave infrared (LWIR) bands. © 2014 SPIE.

AB - While optical spectroscopy has shown great promise in a multitude of applications, the cost, size, and fragility of spectrometer instruments have hindered widespread application of the technology.:tvfEMS microspectrometers offer great hope for low-cost, lightweight, and robust spectrometers, paving the way for pervasive use in many fields. In this invited paper, we report on nearly 15 years of development on MEMS spectrometers in our research group, beginning with devices designed for the shortwave infrared (SWIR) and midwave infrared (MWIR), and moving on to our most recent work towards MEMS spectrometers in the visible and near infrared (NIR) as well as the thermal long-wave infrared (LWIR) bands. © 2014 SPIE.

U2 - 10.1117/12.2053505

DO - 10.1117/12.2053505

M3 - Conference paper

SN - 9781628410389

VL - 9101

SP - 910108

BT - Proceedings of SPIE - The International Society for Optical Engineering

PB - SPIE

T2 - Recent developments towards low-cost MEMS spectrometers

Y2 - 1 January 2014

ER -

Recent developments towards low-cost MEMS spectrometers

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