Process Control of Cantilever Deflection for Sensor Application Based on Optical Waveguides

Research output: Contribution to journalArticle

12 Citations (Scopus)
Original languageEnglish
Pages (from-to)569-579
JournalIEEE Journal of Microelectromechanical Systems
Volume22
Issue number3
DOIs
Publication statusPublished - 2013

Cite this

@article{89fa49ffc80e44cba926ae8f460e1607,
title = "Process Control of Cantilever Deflection for Sensor Application Based on Optical Waveguides",
author = "F. Jiang and Adrian Keating and Mariusz Martyniuk and R. Pratap and Lorenzo Faraone and John Dell",
year = "2013",
doi = "10.1109/JMEMS.2012.2231051",
language = "English",
volume = "22",
pages = "569--579",
journal = "Journal of Microelectromechanical Systems",
issn = "1057-7157",
publisher = "IEEE, Institute of Electrical and Electronics Engineers",
number = "3",

}

TY - JOUR

T1 - Process Control of Cantilever Deflection for Sensor Application Based on Optical Waveguides

AU - Jiang, F.

AU - Keating, Adrian

AU - Martyniuk, Mariusz

AU - Pratap, R.

AU - Faraone, Lorenzo

AU - Dell, John

PY - 2013

Y1 - 2013

U2 - 10.1109/JMEMS.2012.2231051

DO - 10.1109/JMEMS.2012.2231051

M3 - Article

VL - 22

SP - 569

EP - 579

JO - Journal of Microelectromechanical Systems

JF - Journal of Microelectromechanical Systems

SN - 1057-7157

IS - 3

ER -