Proceedings of SPIE: Device and Process Technologies for MEMS, Microelectronics and Photonics III

J-C. Chiao; A.J. Hariz; D.N. Jamieson; Giacinta Parish; V.K. Varadan; Jung-Chih Chiao; Alex J. Hariz; David N. Jamieson; Vijay K. Varadan

Proceedings of SPIE: Device and Process Technologies for MEMS, Microelectronics and Photonics III

J-C. Chiao, A.J. Hariz, D.N. Jamieson, Giacinta Parish, V.K. Varadan, Jung-Chih Chiao (Editor), Alex J. Hariz (Editor), David N. Jamieson (Editor), Vijay K. Varadan (Editor)

Research output: Book/Report › Edited book/Anthology

Original language	English
Place of Publication	Bellingham, Washington, USA
Publisher	SPIE
Volume	5276
Edition	Perth, Western Australia
ISBN (Print)	081945169X
Publication status	Published - 2004

Cite this

@book{6f895add18eb47668d4368a0c54172bf,

title = "Proceedings of SPIE: Device and Process Technologies for MEMS, Microelectronics and Photonics III",

author = "J-C. Chiao and A.J. Hariz and D.N. Jamieson and Giacinta Parish and V.K. Varadan",

editor = "Jung-Chih Chiao and Hariz, \{Alex J.\} and Jamieson, \{David N.\} and Varadan, \{Vijay K.\}",

year = "2004",

language = "English",

isbn = "081945169X",

volume = "5276",

publisher = "SPIE",

address = "United States",

edition = "Perth, Western Australia",

}

TY - BOOK

T1 - Proceedings of SPIE: Device and Process Technologies for MEMS, Microelectronics and Photonics III

AU - Chiao, J-C.

AU - Hariz, A.J.

AU - Jamieson, D.N.

AU - Parish, Giacinta

AU - Varadan, V.K.

A2 - Chiao, Jung-Chih

A2 - Hariz, Alex J.

A2 - Jamieson, David N.

A2 - Varadan, Vijay K.

PY - 2004

Y1 - 2004

M3 - Edited book/Anthology

SN - 081945169X

VL - 5276

BT - Proceedings of SPIE: Device and Process Technologies for MEMS, Microelectronics and Photonics III

PB - SPIE

CY - Bellingham, Washington, USA

ER -