Porous silicon diffraction gratings

Research output: Chapter in Book/Conference paperChapter

Abstract

This work reviews progress in the fabrication of high-resolution porous silicon gratings. A comparison of the various fabrication methods is presented, including prepatterning of silicon, stamping, laser writing, and photolithographic and photo-assisted dissolution. Various types of sensors incorporating gratings are discussed which use either intensity and/or spatial (angular) measurement. The sensing capabilities, features, and limitations of these types of gratings are presented.

Original languageEnglish
Title of host publicationHandbook of Porous Silicon
Subtitle of host publicationSecond Edition
EditorsLeigh Canham
Place of PublicationSwitzerland
PublisherSpringer International Publishing AG
Pages1219-1229
Number of pages11
Volume2-2
Edition2
ISBN (Electronic)9783319713816
ISBN (Print)9783319713793
DOIs
Publication statusPublished - 4 Jul 2018

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