This work reviews progress in the fabrication of high-resolution porous silicon gratings. A comparison of the various fabrication methods is presented, including prepatterning of silicon, stamping, laser writing, and photolithographic and photo-assisted dissolution. Various types of sensors incorporating gratings are discussed which use either intensity and/or spatial (angular) measurement. The sensing capabilities, features, and limitations of these types of gratings are presented.
|Title of host publication||Handbook of Porous Silicon|
|Subtitle of host publication||Second Edition|
|Place of Publication||Switzerland|
|Publisher||Springer International Publishing AG|
|Number of pages||11|
|Publication status||Published - 4 Jul 2018|