Polysilanes - Photochemistry and Deep UV Lithography

RD MILLER, G WALLRAFF, N CLECAK, R SOORIYAKUMARAN, J MICHL, T KARATSU, AJ MCKINLEY, KA KLINGENSMITH, J DOWNING

Research output: Contribution to journalArticle

32 Citations (Scopus)
Original languageEnglish
Pages (from-to)882-886
Number of pages5
JournalPolymer Engineering and Science
Volume29
Issue number13
DOIs
Publication statusPublished - Jul 1989
Externally publishedYes

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