Original language | English |
---|---|
Pages (from-to) | 882-886 |
Number of pages | 5 |
Journal | Polymer Engineering and Science |
Volume | 29 |
Issue number | 13 |
DOIs | |
Publication status | Published - Jul 1989 |
Externally published | Yes |
Polysilanes - Photochemistry and Deep UV Lithography
RD MILLER, G WALLRAFF, N CLECAK, R SOORIYAKUMARAN, J MICHL, T KARATSU, AJ MCKINLEY, KA KLINGENSMITH, J DOWNING
Research output: Contribution to journal › Article › peer-review
32
Citations
(Scopus)