Photostriction actuation of silicon-germanium bilayer cantilevers

V. Chenniappan; G. A. Umana-Membreno; K.K.M.B.D. Silva; M. Martyniuk; A. Keating; J. M. Dell; L. Faraone

doi:10.1063/1.5075525

Photostriction actuation of silicon-germanium bilayer cantilevers

V. Chenniappan, G. A. Umana-Membreno, K.K.M.B.D. Silva, M. Martyniuk, A. Keating, J. M. Dell, L. Faraone

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Abstract

This work presents a study of photostriction-based optical actuation in bilayer cantilevers made of silicon and germanium thin-films and follows previous work in this area on silicon cantilevers. This experimental and theoretical study examines the role of the silicon-germanium heterojunction in optical actuation. It is shown that the germanium layer dominates the mechanical response of the device, which can be exploited to achieve enhanced optical actuation in cantilevers.

Original language	English
Article number	125106
Number of pages	8
Journal	Journal of Applied Physics
Volume	125
Issue number	12
DOIs	https://doi.org/10.1063/1.5075525
Publication status	Published - 28 Mar 2019

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AU - Keating, A.

AU - Dell, J. M.

AU - Faraone, L.

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