Photolighography

Research output: Chapter in Book/Conference paper › Other chapter contribution

Original language	English
Title of host publication	Handbook of Porous Silicon
Editors	Leigh Canham
Place of Publication	Switzerland
Publisher	Springer International Publishing
Pages	531-539
ISBN (Print)	9783319057453
DOIs	https://doi.org/10.1007/978-3-319-04508-5_54-1
Publication status	Published - 2014

Access to Document

@inbook{99773b25f49644609fe5f6a2e1cb7d55,

title = "Photolighography",

author = "Adrian Keating",

year = "2014",

doi = "10.1007/978-3-319-04508-5_54-1",

language = "English",

isbn = "9783319057453",

pages = "531--539",

editor = "Leigh Canham",

booktitle = "Handbook of Porous Silicon",

publisher = "Springer International Publishing",

address = "Switzerland",

}