Performance optimization of InSb infrared focal-plane arrays with diffractive microlenses

J. Bai, W. Hu, N. Guo, Wen Lei, Y. Lv, X. Zhang, J. Si, X. Chen, W. Lü

    Research output: Contribution to journalArticlepeer-review

    27 Citations (Scopus)


    In this paper, diffractive microlens arrays are studied to concentrate incident light onto the effective photosensitive area of InSb infrared focal-plane arrays and thus enhance the quantum efficiency and reduce the crosstalk. Four designs of diffractive microlenses are investigated by a phase-matched Fresnel-elements approach. The quantum efficiency and crosstalk of the devices are calculated by using a two-dimensional device simulation with unit cell of 50 μm. Light propagation through the diffractive microlenses is simulated by the finite-difference time-domain method based on a rigorous vector solution of Maxwell's equations. The results show that the highest quantum efficiency of the device with a diffractive microlens array is about 51.6% and the corresponding crosstalk is 5.06%. The quantum efficiency is 2.1% higher than that of the device with a spherical refractive microlens array. © 2014 TMS.
    Original languageEnglish
    Pages (from-to)2795-2801
    JournalJournal of Electronic Materials
    Issue number8
    Publication statusPublished - 2014


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