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Pattern transferring of Prolift-100 polymer sacrificial layers with controlled sidewall profile
Jorge R. Silva, Hemendra Kala, Dhirendra K. Tripathi, Kirsten Papanastasiou, K. K.M.B.Dilusha Silva, Gino Putrino, Mariusz Martyniuk, Adrian Keating, Jarek Antoszewski, Lorenzo Faraone
Research output: Contribution to journal › Article › peer-review