Optical Performance of a MEMS Tunable IR Microspectrometer

Adrian Keating; Jarek Antoszewski; Dilusha Silva; K.J. Winchester; Tien Nguyen; John Dell; Charles Musca; Lorenzo Faraone

doi:10.1109/COMMAD.2006.4429921

Optical Performance of a MEMS Tunable IR Microspectrometer

Adrian Keating, Jarek Antoszewski, Dilusha Silva, K.J. Winchester, Tien Nguyen, John Dell, Charles Musca, Lorenzo Faraone

Research output: Chapter in Book/Conference paper › Conference paper › peer-review

Abstract

The fabrication issues and optical performance of monolithically integrated microspectrometers are presented. The primary technical challenge in achieving the integration of a MEMS Fabry-Pérot filter with the Hg _xCd_1-xTe detector is to keep the processing temperature less than 125°C. The results show successful device operation with tuning over 440 nm across the SWIR (1.6-2.5 μm) band, lineswidths of 55 nm, and switching times of 60 μs.

Original language	English
Title of host publication	COMMAD '06 Proceedings of the 2006 Conference on Optoelectronic and Microelectronic Materials and Devices
Editors	Lorenzo Faraone, Sabine Betts, John Dell, Charles Musca, Brett Nener, Gia Parish, Justin Wehner
Place of Publication	United States of America
Publisher	IEEE, Institute of Electrical and Electronics Engineers
Pages	224-227
Number of pages	4
Volume	CD
Edition	Perth, Western Australia
ISBN (Print)	1424405785, 9781424405787
DOIs	https://doi.org/10.1109/COMMAD.2006.4429921
Publication status	Published - 2007
Event	2006 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2006 - Perth, Australia Duration: 6 Dec 2006 → 8 Dec 2006

Publication series

Name	Conference on Optoelectronic and Microelectronic Materials and Devices, Proceedings, COMMAD

Conference

Conference	2006 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2006
Country/Territory	Australia
City	Perth
Period	6/12/06 → 8/12/06

Access to Document

10.1109/COMMAD.2006.4429921

Cite this

Keating, A., Antoszewski, J., Silva, D., Winchester, K. J., Nguyen, T., Dell, J., Musca, C., & Faraone, L. (2007). Optical Performance of a MEMS Tunable IR Microspectrometer. In L. Faraone, S. Betts, J. Dell, C. Musca, B. Nener, G. Parish, & J. Wehner (Eds.), COMMAD '06 Proceedings of the 2006 Conference on Optoelectronic and Microelectronic Materials and Devices (Perth, Western Australia ed., Vol. CD, pp. 224-227). Article 4429921 (Conference on Optoelectronic and Microelectronic Materials and Devices, Proceedings, COMMAD). IEEE, Institute of Electrical and Electronics Engineers. https://doi.org/10.1109/COMMAD.2006.4429921

Keating, Adrian ; Antoszewski, Jarek ; Silva, Dilusha et al. / Optical Performance of a MEMS Tunable IR Microspectrometer. COMMAD '06 Proceedings of the 2006 Conference on Optoelectronic and Microelectronic Materials and Devices. editor / Lorenzo Faraone ; Sabine Betts ; John Dell ; Charles Musca ; Brett Nener ; Gia Parish ; Justin Wehner. Vol. CD Perth, Western Australia. ed. United States of America : IEEE, Institute of Electrical and Electronics Engineers, 2007. pp. 224-227 (Conference on Optoelectronic and Microelectronic Materials and Devices, Proceedings, COMMAD).

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title = "Optical Performance of a MEMS Tunable IR Microspectrometer",

abstract = "The fabrication issues and optical performance of monolithically integrated microspectrometers are presented. The primary technical challenge in achieving the integration of a MEMS Fabry-P{\'e}rot filter with the Hg xCd1-xTe detector is to keep the processing temperature less than 125°C. The results show successful device operation with tuning over 440 nm across the SWIR (1.6-2.5 μm) band, lineswidths of 55 nm, and switching times of 60 μs.",

keywords = "IR detector, Microelectromechanical systems",

author = "Adrian Keating and Jarek Antoszewski and Dilusha Silva and K.J. Winchester and Tien Nguyen and John Dell and Charles Musca and Lorenzo Faraone",

year = "2007",

doi = "10.1109/COMMAD.2006.4429921",

language = "English",

isbn = "1424405785",

volume = "CD",

series = "Conference on Optoelectronic and Microelectronic Materials and Devices, Proceedings, COMMAD",

publisher = "IEEE, Institute of Electrical and Electronics Engineers",

pages = "224--227",

editor = "Lorenzo Faraone and Sabine Betts and John Dell and Charles Musca and Brett Nener and Gia Parish and Justin Wehner",

booktitle = "COMMAD '06 Proceedings of the 2006 Conference on Optoelectronic and Microelectronic Materials and Devices",

address = "United States",

edition = "Perth, Western Australia",

note = "2006 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2006 ; Conference date: 06-12-2006 Through 08-12-2006",

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Keating, A , Antoszewski, J , Silva, D, Winchester, KJ, Nguyen, T, Dell, J, Musca, C & Faraone, L 2007, Optical Performance of a MEMS Tunable IR Microspectrometer. in L Faraone, S Betts, J Dell, C Musca, B Nener, G Parish & J Wehner (eds), COMMAD '06 Proceedings of the 2006 Conference on Optoelectronic and Microelectronic Materials and Devices. Perth, Western Australia edn, vol. CD, 4429921, Conference on Optoelectronic and Microelectronic Materials and Devices, Proceedings, COMMAD, IEEE, Institute of Electrical and Electronics Engineers, United States of America, pp. 224-227, 2006 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2006, Perth, Western Australia, Australia, 6/12/06. https://doi.org/10.1109/COMMAD.2006.4429921

Optical Performance of a MEMS Tunable IR Microspectrometer. / Keating, Adrian ; Antoszewski, Jarek ; Silva, Dilusha et al.
COMMAD '06 Proceedings of the 2006 Conference on Optoelectronic and Microelectronic Materials and Devices. ed. / Lorenzo Faraone; Sabine Betts; John Dell; Charles Musca; Brett Nener; Gia Parish; Justin Wehner. Vol. CD Perth, Western Australia. ed. United States of America: IEEE, Institute of Electrical and Electronics Engineers, 2007. p. 224-227 4429921 (Conference on Optoelectronic and Microelectronic Materials and Devices, Proceedings, COMMAD).

Research output: Chapter in Book/Conference paper › Conference paper › peer-review

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AB - The fabrication issues and optical performance of monolithically integrated microspectrometers are presented. The primary technical challenge in achieving the integration of a MEMS Fabry-Pérot filter with the Hg xCd1-xTe detector is to keep the processing temperature less than 125°C. The results show successful device operation with tuning over 440 nm across the SWIR (1.6-2.5 μm) band, lineswidths of 55 nm, and switching times of 60 μs.

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BT - COMMAD '06 Proceedings of the 2006 Conference on Optoelectronic and Microelectronic Materials and Devices

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Keating A , Antoszewski J , Silva D, Winchester KJ, Nguyen T, Dell J et al. Optical Performance of a MEMS Tunable IR Microspectrometer. In Faraone L, Betts S, Dell J, Musca C, Nener B, Parish G, Wehner J, editors, COMMAD '06 Proceedings of the 2006 Conference on Optoelectronic and Microelectronic Materials and Devices. Perth, Western Australia ed. Vol. CD. United States of America: IEEE, Institute of Electrical and Electronics Engineers. 2007. p. 224-227. 4429921. (Conference on Optoelectronic and Microelectronic Materials and Devices, Proceedings, COMMAD). doi: 10.1109/COMMAD.2006.4429921

Optical Performance of a MEMS Tunable IR Microspectrometer

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